3D resist coating compatible with MEMS devices! Miniaturization from water and low-viscosity liquids to high-viscosity liquids.
The "Spray Coater" can handle liquid chemicals from low to high viscosity and can be applied to fine uneven surfaces. Thanks to the spray nozzle capable of fine particle generation, it can form a uniform film on inclined surfaces, cavities, trench structures, and other areas that are difficult to coat with conventional spinners. It is also suitable for applications that require uniform spraying of liquid chemicals, such as anti-reflective coatings, onto glass materials. 【Features】 ■ Capable of coating fine uneven surfaces ■ Compatible with liquid chemicals from low to high viscosity ■ Supports film thickness from a few micrometers to several hundred micrometers ■ Suitable for three-dimensional resist coating and MEMS devices *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Other Features】 - Capable of atomizing from water and low-viscosity liquids to high-viscosity liquids - Injection of ultra-fine particles (about 5μm for low-viscosity liquids) to raindrop size is possible with a single nozzle - Operates at low pressure - Controls airflow within the chamber - No drips or run-off *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■Uniform coating on three-dimensional structures ■Embedding coating on three-dimensional structures ■Thick film coating of high-viscosity materials *For more details, please refer to the PDF document or feel free to contact us.
Company information
Until now, we have continuously faced challenges with the desire to propose optimal system integration to our customers while sensitively responding to the trends of the times in industries such as paper, pulp, automotive, automotive parts, semiconductors, LCDs, and smartphones. Moving forward, we will actively enter the "three industries" of "food, pharmaceuticals, and cosmetics," which are essential for people's lives, while inheriting this way of thinking. Additionally, in fields expected to grow, such as semiconductors and high-performance LCDs, we will actively engage in the development and manufacturing of precision alignment exposure equipment, inspection equipment, and process manufacturing equipment as a device manufacturer.