Reduction of wafer exchange time! Waterproof robot with a 4-axis cylindrical coordinate system using a twin-arm design.
The "STWCR4000 Series" is a waterproof robot with a 4-axis cylindrical coordinate twin-arm design, compatible with 300mm wafers and featuring an inversion and edge grip function. The arm section is coated with Teflon to ensure corrosion resistance, and the joint sections of the arms use V seals for waterproofing. With an IP64 protection rating, it is suitable for transporting wafers in acidic and alkaline environments during the LSI manufacturing process. 【Features】 ■ Compatible with 300mm wafers, inversion and edge grip function ■ Arm section ensures corrosion resistance with Teflon coating ■ V seals used in the waterproof structure of the arm joints ■ Twin-arm design allows for reduced wafer exchange time ■ Ideal for transporting wafers in acidic and alkaline environments *For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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【Usage】 ■Transporting wafers in an atmosphere of acid and alkali during the LSI manufacturing process with protection level IP64. *For more details, please refer to the PDF document or feel free to contact us.
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