Through-hole substrate transport device "Float Chuck LNA-S type"
Ceramic green sheet non-contact transport device "Float Chuck SAG type"
Transport green sheets, through-hole substrates, breathable sheets, and non-woven fabrics without contact.
The non-contact transport device "Float Chuck LNA-S type" suspends and transports ceramic green sheets, through-hole substrates, non-woven fabrics, and breathable sheets without contact by ejecting air. The non-contact transport device "Float Chuck LNA-S type" is equipped with a nozzle that has a mechanism preventing high-speed air flow from directly colliding with the workpiece, allowing for the transport of thin, fragile green sheets with a thickness of 120μm and ultra-thin glass substrates over 50μm in thickness without damage or breakage. Additionally, the non-contact transport device "Float Chuck LNA-S type" has low air consumption and is highly efficient. ◎ Features 1. Transports and handles ceramic green sheets without contact. 2. Capable of transporting through-hole and perforated sheets. 3. Does not damage or break thin ceramic green sheets with a thickness of 120μm. 4. Capable of transporting ceramic green sheets without damage. 5. Low air consumption. 6. Does not pollute the environment.
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basic information
The non-contact transport device "Float Chuck LNA-S type" holds and transports ceramic green sheets in a non-contact manner by blowing air as a gas. The "Float Chuck LNA-S type" is equipped with a nozzle that has a mechanism to prevent high-speed air flow from directly colliding with the workpiece, thereby preventing damage to the thin and fragile green sheets, which are 120μm thick. Additionally, the "Float Chuck LNA-S type" uses a small amount of air, making it efficient. ◎ Features 1. Transports and handles ceramic green sheets non-contact. 2. Capable of transporting through-hole and perforated substrates. 3. Does not damage or break thin ceramic green sheets that are 120μm thick. 4. Can transport ceramic green sheets without bending them. 5. Low air consumption. 6. Does not pollute the environment.
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Applications/Examples of results
Can transport 120μm thick ceramic green sheets, through-hole substrates, non-woven fabrics, and optical films without damage.
Company information
Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.
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