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  5. Analytical Equipment and Devices
  6. Spectroscopic ellipsometry with a wide wavelength range (DUV to NIR)

Spectroscopic ellipsometry with a wide wavelength range (DUV to NIR)

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last updated:Apr 18, 2022

伯東 本社
伯東 本社
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Analysis of wavelengths from 190nm (DUV) to 3,500nm (NIR) allows for the analysis of film thickness and optical constants at user-specified wavelengths.

This is a spectroscopic ellipsometer that adopts a unique method for driving the rotating polarizer (polarization detection). We have developed proprietary software for simultaneous analysis of film thickness and optical constants (refractive index, extinction coefficient), which has undergone several revisions based on requests from long-time users, now reaching its fourth edition. This software features a convenient [Interactive Mode] for analysis and a [Recipe Mode] suitable for repeated measurements. Additionally, it can perform automatic measurements of film thickness distribution, which is helpful for evaluating thickness uniformity.

    Analytical Equipment and Devices
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Spectroscopic ellipsometry with a wide wavelength range (DUV to NIR)

sentech-small.JPG
sentech-small.JPG
  • Related Link - https://www.process.hakuto.co.jp/product/1719/
  • Special site - Product/service details - https://pr.mono.ipros.com/hakuto/product/

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The company was established in Berlin, Germany, in 1990. It sells its self-developed plasma application devices and metrology equipment such as spectroscopic ellipsometers worldwide. In 2010, it completed its own building and obtained ISO 9001 certification. To assist users in improving quality, it manufactures robust and high-quality products and provides support that satisfies users around the world.

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Applications/Examples of results

【Applications】 - Non-destructive analysis of the thickness and optical constants (refractive index, extinction coefficient) of transparent films - Quality control of the thickness and optical constants of transparent films, management of in-plane uniformity

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Spectroscopic Ellipsometry Catalog - SENTECH

Spectroscopic Ellipsometry Catalog - SENTECH

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伯東

伯東 本社

Electronic Components and Semiconductors

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Hakuto Co., Ltd. is a trading company specializing in electronics and providing technical services as a technology trading company and a manufacturer of chemical industrial products, creating a rich future where people and technology coexist by identifying individual needs. Our company was established in November 1953 as a trading company engaged in the import and sale of quartz crystals. The name "Hakuto" is derived from the first character of "Brazil," the origin of quartz, and "Tokyo," representing the east. This name embodies our strong desire to grow as an international trading company that connects not only Brazil and Tokyo but also the wider world. 【Manufacturers/Products Listed on Ipros】 Asahi Kasei / Sensors, Hall elements, ICs Crystal IS / UVC (Deep Ultraviolet) LEDs IMPINJ / RAIN RFID devices, systems, software

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