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  4. Cleaning machine
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  6. Vertical & Spin Leaf Lift-Off Device

Vertical & Spin Leaf Lift-Off Device

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last updated:Oct 21, 2024

ソフエンジニアリング
ソフエンジニアリング
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Can also be used for organic peeling! Significant reduction in filter load can be achieved with cyclones and composite mesh.

The device is a dedicated single-wafer processing equipment designed to address various issues such as the re-adhesion contamination of a large amount of peeling metal debris generated during the lift-off process. In the peeling dip tank, a combination of downflow/QDR/spray/shower/side US/swing is used, while the cleaning and drying spin single-wafer chamber employs special nozzles/MS rinse/HP-Jet, achieving high-efficiency and uniform short-time lift-off without re-adhesion dirt, resulting in a high-purity substrate surface. 【Features】 ■ Usable for organic peeling as well ■ Significant reduction in filter load with cyclone and composite mesh ■ Over 10 years of delivery records with numerous units supplied to major electronic component manufacturers ■ This system can be replaced with the new "Spin/Dip type" or "UDS type" *For more details, please refer to the PDF materials or feel free to contact us. Wafer, single-wafer cleaning equipment, coating and developing equipment, substrate cleaning equipment, spin cleaning equipment, semiconductor manufacturing equipment, semiconductors, resist stripping equipment, megasonic cleaning equipment, cleaning equipment, resist, photoresist, wafer cleaning equipment, wafer cleaning machines, loaders, unloaders.

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Vertical & Spin Leaf Lift-Off Device

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2021-05-12_14h40_37.png
  • Related Link - https://www.sofu-e.com/page5#ttl-navi004
  • Special site - Product/service details - https://pr.mono.ipros.com/sofu-e/product/

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Sofengineering Co., Ltd. Comprehensive Catalog

Sofengineering Co., Ltd. Comprehensive Catalog

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ソフエンジニアリング

ソフエンジニアリング

Industrial Electrical Equipment

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* Under a team of experts well-versed in the manufacturing processes of various devices, we engage in consistent in-house activities that include the custom development, manufacturing, and sales of distinctive wet processing equipment tailored to meet the diverse needs of our clients, backed by years of accumulated know-how since our establishment, as well as after-sales support. * We manufacture and sell optimal system equipment while proposing processes that align with our clients' needs. * Our company is well-acquainted with various equipment forms such as batch (wet stations) and sheet (conveyor, spin), and we have numerous achievements; however, we particularly stand out with our Spin sheet-type equipment. * With the establishment of "patents" and "trademarks," we ensure that our products, such as the "Spin Dip Processor" and "UDS Processor," which possess a wide variety of unique features, cannot be easily replicated by others, attracting worldwide attention.

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