Manual exposure machine compatible with up to 4-inch square substrates.
The ZS Microtech MJB4 is a manual mask aligner (exposure device) that can accommodate substrates up to 4 inches square. It features simple operability, high-precision alignment, and high exposure resolution. It can be used not only for research and development purposes but also for small-scale production.
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basic information
- Supported substrate size Small piece 5×5mm to maximum φ100mm *100×100mm support is optional - Exposure mode Contact soft, hard, vacuum Gap exposure (1~300μm) Options: Flood exposure, split exposure - Exposure optics Wavelength UV400 350~450nm UV300 280~350nm UV250 240~260nm Light source Mercury lamp 200W, 350W Mercury xenon lamp 500W UV-LED (compatible with i, h, g lines) In-plane illuminance uniformity Standard: ±4.0% (standard) MO Exposure Optics: ±2.5% (optional) - Alignment method TSA alignment (surface alignment) Infrared light transmission alignment (optional) - Optional features MO Exposure Optics Objective lens for small substrates Infrared light transmission alignment Monitor image observation (digital camera specification)
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Applications/Examples of results
MEMS Advanced Packaging 3D Packaging Compound Semiconductor Power Devices Solar Power Generation Nanotechnology Wafer-Level Optics
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Company information
Our company started in 1982 as a technical trading company specializing in the sales and maintenance services of semiconductor manufacturing equipment imported from overseas, as a group company of Kanematsu Corporation. Recently, in order to meet the diverse needs of our customers, we have been committed to ensuring that not only manufacturing equipment but also overseas products such as parts, materials, and subsystems can be used with confidence by our customers. While being a trading company, we have enhanced our technical department, which is responsible for planning, development, design, and manufacturing, to propose comprehensive technical solutions and expand our business globally to customers both domestically and internationally. In the future, we aim to continue being a company that provides new added value and services as an electronics technology trading company, growing together with our customers.