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  5. Plasma Generator
  6. Patented new technology: Microplasma processing technology capable of high-speed local processing.

Patented new technology: Microplasma processing technology capable of high-speed local processing.

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last updated:Jun 23, 2021

三友製作所 テクノセンタ
三友製作所 テクノセンタ
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[Free Comparative Data] Achieve efficiency in deep flat processing and localized processing! We also introduce localized plasma processing equipment utilizing localized plasma technology!

Sanyou Manufacturing has successfully developed a new microplasma processing technology. The microplasma processing developed by our company features a high plasma density while maintaining a small plasma diameter, enabling both high-speed processing and maskless localized processing through spot plasma technology. Localized plasma allows for deep trench flat processing and localized processing, significantly reducing the pretreatment time for semiconductor failure analysis samples! In the localized plasma processing equipment utilizing this technology, reaction byproducts can be directly exhausted, allowing for a reduction in processing residues, and furthermore, localized processing can be performed without spraying process gases onto the substrate surface. [Presentation Materials] ■ Comparison materials for plasma sources (Introduction to spot plasma) ■ Introduction materials for localized plasma processing equipment *For more details, please refer to the PDF materials or feel free to contact us. *For details on patents, please also refer to the PDF materials.

    Plasma Generator
三友製作所_製品画像.png

Patented new technology: Microplasma processing technology capable of high-speed local processing.

三友製作所_製品画像.png
三友製作所_製品画像.png
  • Related Link - http://www.sunyou-ss.co.jp/

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*For more details, please refer to the PDF document or feel free to contact us. *Please also refer to the PDF document for details about the patent.

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Local Plasma Processing Equipment Explanation Document

Local Plasma Processing Equipment Explanation Document

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Comparison materials for plasma sources (Introduction to spot plasma)

Comparison materials for plasma sources (Introduction to spot plasma)

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三友製作所

三友製作所 テクノセンタ

Industrial Machinery

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Sanyu Manufacturing Co., Ltd. is a company with a consistent production system that encompasses everything from design to machining and assembly adjustments. In particular, our precision machining division, which possesses unique technology, and our lab automation division, which proposes automation with unique ideas, continue to receive high praise from our customers. We handle a variety of products, including evaluation testing machines for electric cables, industrial measuring instruments, automotive-related parts, medical and analytical equipment, and microfabrication-related products.

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