三友製作所 Product Lineup

Sanyou Manufacturing has successfully developed a new microplasma processing technology. The microplasma processing developed by our company features a high plasma density while maintaining a small plasma diameter, enabling both high-speed processing and maskless localized processing through spot plasma technology. Localized plasma allows for deep trench flat processing and localized processing, significantly reducing the pretreatment time for semiconductor failure analysis samples! In the localized plasma processing equipment utilizing this technology, reaction byproducts can be directly exhausted, allowing for a reduction in processing residues, and furthermore, localized processing can be performed without spraying process gases onto the substrate surface. [Presentation Materials] ■ Comparison materials for plasma sources (Introduction to spot plasma) ■ Introduction materials for localized plasma processing equipment *For more details, please refer to the PDF materials or feel free to contact us. *For details on patents, please also refer to the PDF materials.

• Plasma Generator

The "AP-1000" is a tabletop precision polishing device equipped with a high-precision 6-axis stage. Processing can be done simply by specifying the processing range of the sample on the GUI. There is no need for troublesome height adjustments. It can be used for package local unsealing processes and local substrate thinning processes. 【Features】 ■ Equipped with a high-precision 6-axis stage ■ Auto-leveling function ■ Load detection mechanism ■ Recipe registration function (up to 256 recipes) *For more details, please refer to the PDF document or feel free to contact us.

• Wafer processing/polishing equipment

The "TP-50B" is a 50W model that does not require installation permission applications under the Radio Law, and it is easy to operate, making it a tabletop plasma etching device that allows for casual plasma processing. With its unique spot plasma technology, it enables localized processing and can handle a wide range of plasma processing, from pre-treatment (exposing wiring) for semiconductor failure analysis samples to various plasma applications. Additionally, its compact size makes it suitable for research laboratories with limited space. 【Features】 ■ Compact tabletop size ■ Capable of localized plasma processing (Φ0.5mm and above) ■ Achieves low residue and high-speed processing (10μm/min) ■ Low output RF power supply (maximum output under 50W) ■ Allows for extensive processing by moving samples on a stage *For more details, please download the PDF or feel free to contact us.

• Etching Equipment
• Other semiconductor manufacturing equipment

Sanyu Manufacturing Co., Ltd. is a manufacturing company that produces medical analytical instruments, accessories related to electron microscopes, and tools for semiconductor failure analysis. Since its establishment, the company has focused on precision machining, and the technology cultivated there has shaped our technical foundation. By maintaining a consistent production system from design, machining, to assembly and adjustment, we are able to respond to customers' demands for short delivery times. Currently, the majority of our production is related to medical analytical instruments, but in recent years, we have also been engaged in technology development aimed at the next generation. We aim to anticipate our customers' needs and continuously act as challengers, contributing to the advancement of science and the creation of the future. 【Business Activities】 ■ Manufacturing of accessories related to electron microscopes ■ Manufacturing of semiconductor failure analysis tools ■ Precision machining ■ Manufacturing of analytical instrument-related products *For more details, please download the PDF or feel free to contact us.

• Other semiconductor manufacturing equipment
• Contract manufacturing

The Nano Manipulation Stage is a compact stage unit that achieves zero backlash by adopting our in-house actuator, the SPPA, which integrates coarse and fine motion. It can be easily mounted on the standard stage of an electron microscope, enabling electrical property evaluation and ultra-fine tasks in the nano domain while observing samples! **Features** - **Resolution: Less than 1nm** - The minimum resolution for positioning accuracy is less than 1nm, providing outstanding performance for ultra-precision tasks under an electron microscope. - **Wide Customization and Diverse Variations** - By mounting multiple units of this device on an electron microscope, multi-axis configurations can be achieved, making it adaptable for various applications. We also accommodate special specifications and customizations! - **Zero Backlash Achieved by Adopting the Coarse-Fine Integrated Actuator (SPPA)** - The SPPA (Super Precision Piezo Actuator) is a groundbreaking actuator that allows continuous step motion (coarse motion) and direct operation of the piezoelectric element (fine motion) with a single piezoelectric element!

• others