Here is the answer! Introducing solutions and case studies for mass spectrometry!
"WATMASS" is an ultra-low gas release residual gas analyzer that has improved its ion source to perform high-precision residual gas analysis in the range of 10^-7 to 10^-13 Pa. By adopting a thermal cathode ion source and a sensor nipple tube (ICF70) made of 0.2% BeCu with low radiation and high thermal conductivity, it significantly reduces gas release through low power consumption and cooling of the ion source. Additionally, by manufacturing the grid from a platinum-iridium (Pt-Ir) alloy, it reduces ESD gas release. Thorough low gas treatment using an electric furnace eliminates hydrogen and forms an oxidized Be layer. 【Application Examples】 ■ High-precision gas analysis in XHV/UHV ■ Surface analysis ■ Degradation and gas release of semiconductor devices ■ Gas analysis generated by light stimulation and electron stimulation ■ Trace gas analysis (TDS/Out Gas) ■ Gas analysis of sealed devices/MEMS and leak testing at the level of 10^-17 Pa·m³/s ■ Helium permeability testing of glass and micro-bubble gas analysis *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications (Partial)】 ■Mass range: 100, 200, 300 amu ■Detector type: FC/EM ■Ionization energy: 70 eV ■Filament type: Y2O3-Ir dual filament ■Sensitivity: 1.0 x 10^-6 A/Pa or higher (100 amu FC Sensor) ■Minimum detection speed: 1.8 msec ■Operating temperature: 200℃ (FC), 150℃ (EM) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.
