Achieving miniaturization and low cost! Suitable for valves for high vacuum devices and roughing valves for ultra-high vacuum devices.
The "V Series" is an L-type valve that can be used in high vacuum areas down to approximately 10^-4 Pa. Fluororubber (Viton) O-rings are used for vacuum seals and shaft seals. It is suitable as a valve for high vacuum devices and as a roughing valve for ultra-high vacuum devices. Additionally, the air cylinder used for the pneumatic drive valve is equipped with a position sensor switch for opening and closing. 【Features】 ■ Usable in high vacuum areas down to approximately 10^-4 Pa ■ Fluorogrease is used only for the shaft seal section ■ Equipped with a position sensor switch for opening and closing ■ Drive methods - Pneumatic - Manual *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■V-025RV-CN ■V-025RV-MN *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.
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