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  6. KNF Turbo Molecular Pump TMP Auxiliary Pump

KNF Turbo Molecular Pump TMP Auxiliary Pump

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last updated:Nov 28, 2025

ケーエヌエフ・ジャパン KNF JAPAN
ケーエヌエフ・ジャパン KNF JAPAN
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TMP roughing pump (turbo molecular pump auxiliary pump)

The oil-free feature of diaphragm vacuum pumps eliminates contamination from oil mist and does not require oil replenishment, making them highly maintainable. They are ideal for use in clean rooms, such as turbo molecular pumps.

    Other pumps
N_813-4_ANDC-B-RGB-300dpi_jpg.jpg

KNF Turbo Molecular Pump TMP Auxiliary Pump

N_813-4_ANDC-B-RGB-300dpi_jpg.jpg
N_813-4_ANDC-B-RGB-300dpi_jpg.jpg N_84-4_ANDC-RGB-300dpi_jpg.jpg N_950_KNE-W-RGB-300dpi_jpg.jpg
  • Related Link - https://knf.com/ja/jp
  • Special site - Product/service details - https://pr.mono.ipros.com/knf/product/

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basic information

N84.4ANE Exhaust speed 4.2 l/min Achievable vacuum level 7 mbar abs N84.4ANDC-B Exhaust speed 4.8 l/min Achievable vacuum level 2 mbar abs N813.4ANDC-B Exhaust speed 13 l/min Achievable vacuum level 0.5 mbar abs N813.5ANDC-B Exhaust speed 19 l/min Achievable vacuum level 1 mbar abs N920APDC-B Exhaust speed 21 l/min Achievable vacuum level 1.5 mbar abs N950.50KNDC-B Exhaust speed 55 l/min Achievable vacuum level 2 mbar abs

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Applications/Examples of results

- Turbo molecular pump auxiliary pump - TMP roughing pump - Gas sampling etc.

Detailed information

  • N_813-4_ANDC-B-RGB-300dpi_jpg.jpg

    A TMP roughing pump with four pump heads plumbed in parallel to series, enhancing exhaust speed and vacuum level.

catalog(6)

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KNF N84 Series Diaphragm Vacuum Pump

KNF N84 Series Diaphragm Vacuum Pump

PRODUCT
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KNF N920 Series Diaphragm Vacuum Pump

KNF N920 Series Diaphragm Vacuum Pump

PRODUCT
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KNF N952 Series Diaphragm Vacuum Pump

KNF N952 Series Diaphragm Vacuum Pump

PRODUCT
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KNF N84.3.29 Series Diaphragm Vacuum Pump

KNF N84.3.29 Series Diaphragm Vacuum Pump

PRODUCT
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Adoption of diaphragm technology for the exhaust of turbo molecular pumps.

Adoption of diaphragm technology for the exhaust of turbo molecular pumps.

TECHNICAL
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KNF N84.4 N84.5 Series Diaphragm Vacuum Pump

KNF N84.4 N84.5 Series Diaphragm Vacuum Pump

PRODUCT
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News about this product(1)

Dry vacuum pumps and liquid pumps for the semiconductor industry.

  • Product news

KNF provides state-of-the-art oil-free vacuum pumps and liquid pumps that meet the stringent standards of the semiconductor industry. - Reasons why diaphragm pumps are optimal for vacuum generation - Recirculation of inert gas for lithography lasers - Reasons why diaphragm pumps should handle semiconductor process liquids

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Company information

ケーエヌエフ・ジャパン

ケーエヌエフ・ジャパン KNF JAPAN

Machine elements and parts

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KNF was founded by Kurt Neuberger in 1946 in Freiburg, Germany (Freiburg im Breisgau). Since then, we have been a family-owned independent company providing our customers with security and stability. Over the years, we have achieved steady growth and expanded our business globally while accumulating experience. Currently, with 17 subsidiaries worldwide, we continue to deepen our expertise in various industries and advance the expansion of product applications. As a company specializing in the development, design, manufacturing, and sales of diaphragm pumps and gas and liquid handling systems, we have established our position globally as a provider of customer-oriented solutions to address challenges. Innovation means having an open attitude towards new approaches and various methods, and appropriately judging and identifying what will be needed for the future. By bringing together expertise from various engineering fields, including mechanical engineering, materials, fluid engineering, electronics, and software, we strive to find optimal and smart solutions for all applications, not only for our customers' current needs but also for their future requirements.

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