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  1. Home
  2. Machine elements and parts
  3. ケーエヌエフ・ジャパン KNF JAPAN
  4. Dry vacuum pumps and liquid pumps for the semiconductor industry.
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  • Feb 14, 2025
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Feb 14, 2025

Dry vacuum pumps and liquid pumps for the semiconductor industry.

ケーエヌエフ・ジャパン ケーエヌエフ・ジャパン KNF JAPAN
KNF provides state-of-the-art oil-free vacuum pumps and liquid pumps that meet the stringent standards of the semiconductor industry. - Reasons why diaphragm pumps are optimal for vacuum generation - Recirculation of inert gas for lithography lasers - Reasons why diaphragm pumps should handle semiconductor process liquids
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FM50_weiss.jpg

Liquid Quantitative Delivery Pump METERING PUMP FM50 Series

A state-of-the-art diaphragm liquid pump boasting extremely stable liquid flow, unprecedented flow accuracy, and reproducibility.

- Very stable liquid flow rate - Large flow range - Linear and predictable flow - Minimal variation in pump individual differences - High accuracy through end-of-line calibration - Self-sustaining, capable of dry running - Capable of handling fine particles - Brushless DC motor with digital customization options

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Liquid diaphragm pump "FM 50" *Quantitative liquid delivery pump

Self-sufficient, contamination-free, maintenance-free, wide range of variable flow, digital customization.

The liquid diaphragm pump "FM 50" achieves flow accuracy that surpasses our conventional diaphragm liquid delivery pumps, with a precision of ±2% and reproducibility of ±1%, providing stable liquid delivery with minimal flow variation due to pressure fluctuations. 【Features】 ■ Extremely stable liquid flow ■ Linear and predictable flow rate ■ No variation between pumps ■ High accuracy through calibration in the final stage ■ Safety in self-suction and dry running *For more details, please download the PDF or contact us directly.

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KNF FP1.150 Diaphragm Liquid Pump

High-output type, pulsation control design diaphragm liquid pump, ideal for inkjet printers, high-pressure cleaning systems, etc., with corrosion-resistant components also available.

- High discharge design, maximum allowable discharge pressure 0.6 MPa - Reduced pulsation in liquid delivery - Long lifespan design - Excellent linearity - Self-sustaining - Transfer of sensitive liquids - Abundant wetted materials Significantly reduces pulsation using five diaphragms, controls flow rate with an external signal to a brushless DC motor, and demonstrates a linear flow curve based on the control signal. It offers extensive customization for users' technical challenges and various optional parts are available.

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FK 1100 KPDCB-4.jpg

KNF FK1100 Diaphragm Liquid Pump

Durable, pulsation-reducing liquid pump FK100

- Pulsation-reducing liquid pump with new design - Variable flow control with brushless motor - Abundant wetted material options - Self-priming - NSF certified materials (optional) - AC motor specification (optional) Basic flow rate: 12.4 l/min (KP) / 11.5 l/min (KT) Suction lift: 4.5 mWg Discharge lift: 10 mWg

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FK 1.1100 KPDCB-4.jpg

KNF FK1.1100 Diaphragm Liquid Pump

Durable type, pulsation-reducing liquid pump FK100 with high discharge specifications, maximum allowable discharge pressure 0.6 MPa.

- Pulsation-reducing liquid pump with new design - Variable flow control with brushless motor - Abundant wetted materials - Self-sustaining - NSF certified materials (optional) - AC motor specification (optional) Basic flow rate: 12.4 l/min (KP) / 11.5 l/min (KT) Suction lift: 4.5 mWg Discharge lift: 60 mWg

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KNF Turbo Molecular Pump TMP Auxiliary Pump

TMP roughing pump (turbo molecular pump auxiliary pump)

The oil-free feature of diaphragm vacuum pumps eliminates contamination from oil mist and does not require oil replenishment, making them highly maintainable. They are ideal for use in clean rooms, such as turbo molecular pumps.

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fp400_front.jpg

KNF FP Series Pulsation Control Diaphragm Liquid Pump

Pulsation-reducing liquid pump, a diaphragm liquid pump that significantly reduces pulsation generated during pump suction and discharge.

We have reviewed the design of the pump itself as a liquid pump for pulsation reduction measures. Traditionally, pulsation reduction was achieved using dampers, but we have significantly suppressed pulsation with the pump itself. - FP70 Series We have integrated the pulsation reduction damper with the pump. - FP150 / FP400 / FK1100 Series We have increased the number of diaphragms to a maximum of five, allowing for the cancellation of pulsation within the pump. - FP1.150 / FP1.400 / FK1.1100 Series We have increased the number of diaphragms to a maximum of five, allowing for the cancellation of pulsation within the pump. Additionally, we have improved the maximum allowable discharge pressure to 6 bar (0.6 MPa), achieving smooth liquid transfer even under challenging pressure conditions.

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FP 70 KPDC iso.png

FP70 Series Diaphragm Liquid Pump

Pulsation Reduction Gentle Flow Diaphragm Liquid Pump

- The pulsation reduction feature allows for the transfer of liquids with minimal pulsation. - Due to the reduced pulsation, pressure loss in the tubing can be minimized. - It enables the transfer of liquids with fewer air bubbles. - It can reduce the optional parts for pulsation reduction measures. - Equipped with a newly developed valve, it can achieve self-priming suction even at lower motor speeds. - Flow rate adjustment is possible through brushless motor control. - Materials with NFS certification are also available. Basic flow rate: 700 ml/min Diaphragm material: EPDM / PTFE

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KNF FP150 Pulsation Dampening Liquid Pump

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Machine elements and parts
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Hyper CLT flooring panel

Utilized for temporary roads on slopes | Wood CLT "Hyper CLT Paving Slabs"

  • NEW
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In civil engineering sites such as mountainous areas and construction sites, it may be necessary to use wooden boards on slopes or inclined access roads. Hyper CLT boards are civil engineering materials utilizing wood CLT, which can be laid not only on flat ground but also on sloped terrain. They can be used for temporary roads, access routes, heavy machinery entry paths, and measures against muddy conditions, creating a driving environment that takes advantage of the unique surface characteristics of wood. The 5×10 board weighs approximately 230 kg, and the 5×20 board weighs about 460 kg, making them lightweight and easy to install and remove even with small machinery, which is a notable feature for maneuverability in narrow sites. This wooden board is registered as a technology under the Ministry of Land, Infrastructure, Transport and Tourism's NETIS system as "TH-250021-A," and can also be utilized for safety measures and innovative ideas in public works.

Aug 21, 2026

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Metal Crack Repair: MS Method for Repairing Cracks and Fractures in Machinery Equipment

  • NEW
  • PRODUCT

Metal cracks are one of the concerns in equipment maintenance operations. Repairs using conventional welding methods can alter the base material around the crack due to heat, leading to residual stress and deformation, which always carries the risk of "crack recurrence" or "secondary damage." Hinode Waterworks Equipment Co., Ltd.'s "Mechanical Stitching Method" is a new technique that allows for the repair of metal cracks without applying heat. By using special bolts and reinforcement plates, the crack is physically removed without affecting the base material with heat. Repairs can be performed even in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. For more details, please contact us or download the catalog.

Aug 21, 2026

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Casting sand mold 3D printer prototype production

  • NEW
  • COMPANY

● The production time for cast prototypes can be shortened! Since model making is not required, the production time for prototypes, which previously took about a month, can be significantly reduced. ● Model costs can be reduced! By directly producing sand molds from 3D data, there is no need for model production costs. If changes to the model are necessary, they can be addressed by modifying the 3D data. ● Similar products with different shapes and dimensions can be prototyped simultaneously! Different products, such as similar shapes or varying dimensions, can be molded at the same time in one molding process. This allows for the verification of multiple types in a short period.

Aug 21, 2026

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■■ Sealed Product Air Leak Test Device | MSZ-0701 series ■■ New standard for waterproof testing. "Dry" non-destructive testing that does not wet electronic devices or packaging. Capable of testing the waterproofness of sealed products (equivalent to IPX7, IPX8).

  • NEW
  • PRODUCT

● To determine the sealing and waterproofing of sealed products based on pressure changes, it is not necessary to conduct tests that involve spraying water on the product or immersing it in water. ● Once the product is placed in a dedicated fixture within the inspection device, waterproofing can be quantitatively confirmed through automatic measurement. ● The target product size is W 300 × D 210 × H 100 mm or smaller. ● The target products include automotive cameras, smartphones, ECUs, small motors, and other packaging containers, and are effective for any products that require confirmation of sealing, waterproofing, and airtightness. ● For product specifications and details, please contact us.

Aug 20, 2026

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■■ Air-tight inspection device for electronic devices with a size of 10 mm square | MSX-7003 series ■■ Capable of fully automatic inspection of relatively large electronic components. LED, optical devices, high-frequency devices, power semiconductors, IR sensors, gyro sensors, angular velocity sensors, etc.

  • NEW
  • PRODUCT

The inspection targets of the "MSX-7003 series" are relatively large electronic devices. 【Inspection Targets】 - LED - Optical devices - High-frequency devices - Power semiconductors - IR sensors - Gyro sensors - Angular velocity sensors - Electrolytic capacitors, etc. The transport system is designed based on "pallet to pallet" to accommodate various types of work. The following three processes are performed automatically by the airtight inspection device: - Helium bombarding - Gross leak test - Fine leak test For packaged products smaller than 10 mm on each side, the work is set up using pallets or trays, followed by helium bombarding ↓ Then transported to the leak test process through high-speed handling ↓ Going through a continuous process from the gross leak test to the fine leak test ↓ And finally, discharged onto a pallet through high-speed handling. It also supports inline operations (the height of the pass line is 940 mm). Please watch the YouTube video from the link below.

Aug 20, 2026

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