Contracted Services: Mass Gas Analysis <Presentation of materials with explanations of the analysis system>
Contract analysis services using a high-precision quadrupole mass spectrometry system. Detection of ultra-microscopic leaks as well.
Our company offers a service for gas analysis (leak measurement) of samples received from customers using a high-precision quadrupole mass spectrometry system. We employ a vacuum structural material made of 0.2% BeCu alloy with "low gas emission" in our analytical equipment, enabling the detection of extremely small leaks below 10^-15 Pa·m³/s (He) through destructive testing of the device. This contributes to failure analysis, quality improvement, and quality control of semiconductor devices. [Measurement Examples] ■ Measurement of residual and emitted gases between layers of semiconductor chips ■ Measurement of gas emissions from semiconductor wafer substrates ■ Measurement of residual gases within MEMS device chips ■ Ultra-small leak checks for sealed devices * In addition to introducing this service, you can view materials that explain the analytical system by downloading the PDF. Please feel free to contact us with any inquiries.
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basic information
【Flow of Contract Analysis】 1. Receive the test specimen 2. Check the test specimen and provide counseling on testing methods, sample holders, etc. 3. Set up on the equipment 4. Destruction of the test specimen and analysis of released gases 5. Obtain analysis data 6. Report analysis results *For details of the service, please download and review the materials.
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For more details, please refer to the PDF document or feel free to contact us.
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Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.
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