A high-output, high-stability LED light source device capable of mounting multiple modules of the same wavelength. Maximum high-power UV output of 80W, mercury-free.
ALE/2 is an LED ultraviolet irradiation device that achieves high output and high stability, surpassing conventional discharge lamps. It is equipped with up to four built-in LED wavelengths, allowing for multiple wavelength outputs. A significant difference from the ALE/1 in the ALE series is the ability to mount multiple modules of the same wavelength. Therefore, it is possible to output only the i-line or g-line at high intensity, making it suitable for semiconductor applications. The LED modules can be easily replaced, allowing for flexible adaptation to changes in applications.
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basic information
Product Features - Ultra high power UV output: up to 80W (single wavelength also available) - Mercury-free - High stability with LED, reduced running costs - Selectable built-in LEDs - 365nm/385nm/405nm/435nm - Output maintenance through feedback control - Genuine cooling system provided. Can be integrated into existing systems.
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Applications/Examples of results
■UV-LED light source device for semiconductor applications - Mask aligner - Wafer stepper - Wafer edge exposure - Light source for photomask inspection ■Curing of UV resin
Line up（4）
| Model number | overview |
|---|---|
| ALE/1.1 | |
| ALE/1.2 | |
| ALE/1.3 | |
| ALE/2 |
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K.L.V. has been discovering cutting-edge optical components from around the world and supporting the development of various optical technologies, particularly in the fields of medicine, environment, and analysis. With the theme of "SOLUTION FOR OPTICAL SYSTEM DEMANDS," we are actively building and expanding our optical solution business. We aim to respond to our customers' increasingly sophisticated and diverse needs more quickly and accurately than anyone else, becoming a company that contributes to both business and society. As a "specialized trading company proposing the utilization of optical energy," we invite you to look forward to our unique and promising optical solutions that will pave the way for a new era of light.