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  5. Stepper
  6. Multispectral LED light source device ALE/3

Multispectral LED light source device ALE/3

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ALE/3

last updated:Feb 25, 2026

ケイエルブイ
ケイエルブイ
  • Official site

High-output, high-stability LED light source device. High-power UV output up to 15W, mercury-free, with selectable built-in LEDs.

This is a high-output, high-stability LED light source device that replaces conventional discharge lamps. It can accommodate up to five types of LEDs, allowing for output at multiple wavelengths. Additionally, the LED modules can be easily replaced, providing flexibility for changes in applications.

    StepperOther semiconductor manufacturing equipment
Primelite_ALE3.png

Multispectral LED light source device ALE/3

Primelite_ALE3.png
Primelite_ALE3.png
  • Related Link - https://www.klv.co.jp/product/uv-irradiation-devic…

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basic information

Product Features - High power UV output: up to 15W - Mercury-free - High stability with LED, reduced running costs - Selectable built-in LEDs - Single wavelengths: 365, 385, 395, 405, 435 nm - Multiple wavelengths: 365 and 405 nm - No external cooling device required, easy integration into new or existing systems

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Applications/Examples of results

・Photolithography ・3D Printing ・UV Curing ・Inspection

Line up(3)

Model number overview
ALE/1.1
ALE/1.2
ALE/1.3

News about this product(1)

SEMICON Japan 2024 Exhibition

  • Seminar・Event

Event Date: December 11 (Wednesday) to December 13 (Friday), 2024 Venue: Tokyo Big Sight, East Exhibition Hall, Hall 7 Featured Products: - Mask aligners, peripheral exposure, high-output LED irradiation devices for steppers - Semiconductor surface inspection equipment - High-spectral camera capable of video recording - Compact spectrometer - LPP-EUV light source - Laser-excited white light source (190–2500nm) - Ultra-high sensitivity CCD camera for VUV and X-ray regions - Plasma source - SC light source (supercontinuum light source)

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ケイエルブイ

ケイエルブイ

Testing, Analysis and Measurement

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K.L.V. has been discovering cutting-edge optical components from around the world and supporting the development of various optical technologies, particularly in the fields of medicine, environment, and analysis. With the theme of "SOLUTION FOR OPTICAL SYSTEM DEMANDS," we are actively building and expanding our optical solution business. We aim to respond to our customers' increasingly sophisticated and diverse needs more quickly and accurately than anyone else, becoming a company that contributes to both business and society. As a "specialized trading company proposing the utilization of optical energy," we invite you to look forward to our unique and promising optical solutions that will pave the way for a new era of light.

Product/Service List (69)

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