Equipped with a holder that supports substrate rotation and substrate heating! Continuous film deposition is possible without releasing into the atmosphere!
This product is an organic and metal deposition device compatible with 100×100 substrates. It is connected to a glove box for mask exchange, allowing for continuous film deposition without exposing the atmosphere. The deposition source is a large deposition chamber equipped with multiple resistance heating deposition sources, organic-only deposition sources, and conical deposition source K cells. 【Features】 ■ Compatible with 100×100 substrates ■ Connected to a glove box for mask exchange ■ Equipped with multiple resistance heating deposition sources, organic-only deposition sources, and conical deposition source K cells ■ Includes a holder compatible with substrate rotation and heating ■ Excellent film thickness distribution *For more details, please refer to the PDF materials or feel free to contact us.
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