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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Triple-chamber electron beam evaporation device

Triple-chamber electron beam evaporation device

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last updated:Oct 06, 2022

ケニックス
ケニックス
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Easy maintenance and workability! The lift-off film formation mechanism employs a special heat insulation mechanism!

This product is an electron beam evaporation device capable of lift-off film formation, targeting metallic materials. The triple EB gun features a sliding movement mechanism, making maintenance and operation easy. The maximum substrate size is φ3 inches, and the lift-off film formation mechanism employs a special heat shielding mechanism. 【Features】 ■ Substrate size: Maximum φ3 inches ■ Substrate heating temperature: Normal use 600℃ ■ Lift-off film formation mechanism: Special heat shielding mechanism adopted ■ Electron beam gun: Hars 3-way manual sliding movement type ■ EB gun maintenance mechanism: EB gun sliding movement mechanism *For more details, please refer to the PDF document or feel free to contact us.

    Evaporation Equipment
2022-10-04_14h53_50.png

Triple-chamber electron beam evaporation device

2022-10-04_14h53_50.png
2022-10-04_14h53_50.png
  • Related Link - http://www.kenix.jp/product/shinkuu.html

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ケニックス

ケニックス

Electronic Components and Semiconductors

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