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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Glove box connected organic and metal deposition device

Glove box connected organic and metal deposition device

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last updated:Oct 06, 2022

ケニックス
ケニックス
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Equipped with a holder that supports substrate rotation and substrate heating! Continuous film deposition is possible without releasing into the atmosphere!

This product is an organic and metal deposition device compatible with 100×100 substrates. It is connected to a glove box for mask exchange, allowing for continuous film deposition without exposing the atmosphere. The deposition source is a large deposition chamber equipped with multiple resistance heating deposition sources, organic-only deposition sources, and conical deposition source K cells. 【Features】 ■ Compatible with 100×100 substrates ■ Connected to a glove box for mask exchange ■ Equipped with multiple resistance heating deposition sources, organic-only deposition sources, and conical deposition source K cells ■ Includes a holder compatible with substrate rotation and heating ■ Excellent film thickness distribution *For more details, please refer to the PDF materials or feel free to contact us.

    Evaporation Equipment
2022-10-04_15h03_20.png

Glove box connected organic and metal deposition device

2022-10-04_15h03_20.png
2022-10-04_15h03_20.png
  • Related Link - http://www.kenix.jp/product/yuukihakumaku.html

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ケニックス

ケニックス

Electronic Components and Semiconductors

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