In addition to the conventional chromatic aberration confocal method and spectral interference method, a thickness measurement sensor utilizing laser heating has also emerged. It can measure the thickness of both transparent and opaque materials non-contactly.
Presitech is a German manufacturer of non-contact sensors. It develops and manufactures optical sensors using chromatic aberration confocal method and spectral interference method. At the end of 2022, it acquired the French company Enovasense, adding sensors that utilize laser heating to measure the thickness of opaque materials to its lineup. The company specializes in high-speed and high-precision thickness measurement, which is used for inspecting wafers, coatings, films, paint films, anti-corrosion coatings, and more. It offers a wide measurement range, tolerance angles, and can accommodate various materials, including line sensors and area scanners suitable for full surface measurement. There are numerous achievements in integrating these sensors into semiconductor manufacturing equipment, and they are also used in LCD manufacturing equipment and inline inspection of films. Additionally, they are utilized as embedded sensors for tabletop machines such as standalone units. Enovasense's sensors have also demonstrated success in measuring coating thickness for aerospace-related components. *For product details, please refer to the materials available for download in PDF format. Feel free to contact us with any inquiries.*
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**Principle** Our products mainly have three types of measurement principles. ■ Chromatic Aberration Confocal Primarily used for measuring surface shapes, but can also be utilized for measuring the thickness of transparent materials. While it is less accurate than spectral interference methods, it is recommended if you are looking for a cost-effective thickness measurement. ■ Spectral Interference Method Mainly used for thickness measurement. It enables high-precision measurements at the sub-micron level, leveraging the strengths of the spectral interference method. High-speed measurements necessary for in-situ, monitoring, or inline applications are possible. ■ Method Utilizing Laser Heating (Sensors from Enovasense) Heats the target object with a laser diode. It takes advantage of the fact that the speed of heat propagation differs depending on thickness. Using a proprietary algorithm, it detects the radiant heat from the target object and converts it into thickness. **Product Lineup** - Single Point Sensors Available in high-precision types as well as more affordable options under 1 million yen. - Line Sensors Using chromatic aberration confocal technology, it can perform full-area measurements in conjunction with an operating stage. - Area Scanner Sensors A type that can perform area scans with a two-axis galvanometer. There are also area scanners that do not require an operating stage and are unaffected by vibrations.
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P5
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Applications/Examples of results
Please use for the following thickness measurement applications: wafers, doped wafers, coatings, films, paint films, anti-corrosion coatings, films, battery foils, paint films, wet coatings, dry coatings, alloy coatings for rust prevention, vapor-deposited films, aluminum anodizing, zinc plating, and coatings on fuel cell bipolar plates.
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Company information
Presitech is a specialist in laser material processing and optical measurement technology. We are not just a supplier of systems and components, but a professional partner in ensuring a smooth processing process for our customers. We offer consultations from the foundational stage and accurately consult with customers on their requests and objectives. We understand that the key to success in unique processing processes lies in the four components of exhibition, monitoring, processing, and control. Only by doing so can we provide appropriate solutions for our customers' applications. Our high-quality products, such as laser processing heads, quality monitoring systems, and optical measurement systems for spacing/thickness measurement, allow customers to directly benefit from our decades of experience. Our optical sensors are characterized by the highest precision and dynamic adaptability. Furthermore, they detect accurate values even in high-speed measurements.