[SO Sheet Introduction Case] Three-Dimensional Lithography Processing Technology

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last updated：Jun 27, 2023

アイセロ

Official site

Expose the resist on the plane! As the pattern becomes finer, the pattern is disturbed due to light diffraction.

As a case study for the PET/PVA two-layer film "SO Sheet" that we handle, we would like to introduce the "three-dimensional lithography processing technology." Examples include "fine processing of a plano-convex lens with a height difference of 220μm," "fine processing of concave molds," and "creation of antibacterial patterns on metal rolls and their transfer to films." For more detailed information, please refer to the related catalog. 【Examples of Three-Dimensional Lithography Processing Technology】 ■ Fine processing of a plano-convex lens with a height difference of 220μm ■ Fine processing of concave molds ■ Creation of antibacterial patterns on metal rolls and their transfer to films *For more details, please refer to the PDF materials or feel free to contact us.

Related Link - https://www.aicello.co.jp/product/so_sheet/

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basic information

【Overview】 ■ As the pattern becomes finer, the pattern is disturbed due to light diffraction (it is difficult to achieve uniform resist film formation with a spinner, and the gaps during exposure are not uniform) 　↓ ■ Photoresist: Film formation of resist material, exposure of resist on a flat surface, sheet with latent image pattern 　↓ ■ Attachment to curved substrate, PET peeling, PVA hydrolysis, resist development 　↓ ■ Etching, deposition, doping * For more details, please refer to the PDF document or feel free to contact us.