It is possible to perform conductive treatment for EDS (EDX), EPMA, and XMA, create protective films for FIB, and provide carbon reinforcement, among other things.
The VC-300 series enables reliable carbon deposition by using rotary pump exhaust and monitoring vacuum levels with a Pirani gauge. The carbon is in a replaceable core type with a diameter of 0.5 mm, eliminating the need for trimming and keeping the surroundings always clean. Additionally, the electrode part does not become hot, so there is no risk of burns during continuous deposition. It achieves space-saving and low cost.
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basic information
- Sample chamber size = inner diameter 120mm × depth 140mm. Made of hard glass. - Sample stage size = diameter 100mm, adjustable vertically 30mm up and down relative to the evaporation source. - Distance between the evaporation source and the sample stage = adjustable between 45mm and 75mm. - Evaporation power supply = two-stage OUTGAS and EVAPO, preset to optimal voltage. - Rotary pump = 50 ℓ/min. Achieves a vacuum level of 1.0Pa with the RP alone. - Equipment vacuum level = below 2Pa (1.5×10^-2 Torr). - Vacuum monitoring = indicated up to 0.1Pa (7.5×10^-4 Torr) with a Pirani gauge. - Equipment size = width 255mm × depth 375mm × height 430mm. - Rotary pump is a floor-standing type. (Includes a 1m flexible hose made of SUS) - Power supply = single-phase AC100V, 15A, using a three-core plug with a ground wire. - Safety measures: Electrode power supply is limited to only during vacuum evacuation, with circuit protectors for each system.
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Price range
P5
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Company information
We manufacture sputtering devices, deposition devices, plasma irradiation devices, CVD devices, and vacuum components. We offer a lineup of pre-treatment devices for electron microscope sample preparation and small vacuum devices for research and development institutions. We believe it is our company's mission to quickly and affordably supply the necessary equipment development for those active in cutting-edge technology research and development, and to support development by making incremental improvements and modifications during the experimental process. We are involved in the development, commercialization, sales, and service of experimental instruments and devices necessary for new technology development in the fields of semiconductors, biotechnology, environment, and nanotechnology, as well as devices related to electron microscope sample preparation as cutting-edge analytical tools for new technology development.
