A high-speed drawing device compatible with 300x300mm square substrates has been added to the VPG series.
- High precision and high-speed rendering - Maximum drawing area 300x300mm²
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basic information
Minimum dimension of 0.5um, capable of drawing line space up to 0.8um. Selectable write modes (minimum dimension of 0.5um or 0.8um) High-output DPSS laser Maximum drawing area of 300x300mm² Real-time autofocus Auto loader Substrate detection function Backside alignment function Adoption of Zerodur Stage control using high-precision differential interferometer
Price range
P9
Delivery Time
Applications/Examples of results
- Mask drawing - Device prototyping
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Company information
Heidelberg Instruments, Inc. is the Japanese subsidiary of Heidelberg Instruments Mikrotechnik, a German company that develops and manufactures laser direct writing systems and mask writing systems. We provide sales and technical services for laser direct writing systems within Japan. We offer a wide range of products, including laser writing systems and maskless aligners. For anything related to laser lithography, please feel free to consult with us.