Experimental machines for wafers to mass production machines can be manufactured - Oven (sintering) unit.

Introduction of SCREEN FAVAX's uniquely designed "Oven (Baking) Unit," which is part of our group.

Thanks to the unique design of SCREEN Fabex, which is part of our group, we boast high performance in temperature reproducibility and in-plane temperature uniformity. The firing unit, which is part of the coater developer series for the LCD market, is being expanded into other industries. From manual experimental machines to mass production machines, and from small to large work sizes, we propose suitable specifications. We manufacture equipment tailored to our customers' requests. 【Features】 ■ Space-saving ■ Low dust generation ■ High temperature reproducibility and in-plane temperature uniformity ■ Custom equipment manufacturing according to customer requests 【Specifications】 ■ Temperature performance: 0-200℃ ■ Temperature accuracy: ±3℃ at 150℃ ■ Work size: 4 to 12-inch wafers ■ Method: Hot plate method (substrate support: prokipin or lift pin)

Other processing machines