Compatible with large substrates! High-speed beam adjustment using a fully automated power control system.
The "LBS-120HC" is a high-current DC discharge line beam ion source that can be applied to high-speed ion beam milling equipment. It features a high-current density ion beam using a thermionic cathode, with excellent beam distribution uniformity achieved through optimized magnetic field design. Additionally, we offer a dedicated power supply "SPS-HC2" designed for fully automated high-speed beam adjustment. 【LBS-120HC Features】 ■ High-current density ion beam using a thermionic cathode ■ Excellent beam distribution uniformity due to optimized magnetic field design ■ High-speed beam adjustment through a fully automated power control system ■ Equipped with a neutralizer *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Lineup】 ■LBS-120HC ■SPS-HC2 *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Application Examples】 ■High-speed milling of MEMS structures ■Precision milling of magnetic memory ■Resonant frequency adjustment of high-frequency devices *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Noberion Systems Co., Ltd. is a company that develops and manufactures plasma application devices and offers contract processing for special film deposition processes. As a technology development-oriented venture company, it is advancing the development of ECR (Electron Cyclotron Resonance) high-density plasma sources and ECR high-current ion beam sources to meet new technological needs using oxygen and various active gases.