Fully Automatic RTP (Rapid Thermal Processing) Equipment

Premtek　RTP-1200A（SEC）（SEF）

This is a fully automatic RTP device with a single chamber that supports 4 to 8-inch wafers. The transport method can be selected between open cassette and SMIF, with two cassette stations available. The wafers are stored in a susceptor for processing, achieving excellent Rc and temperature uniformity regardless of wafer characteristics such as warping, thickness, and transmittance. The heat source is a halogen lamp, arranged on both the top and bottom sides. The temperature measurement range is from 20°C to 1250°C. Thermocouples and pyrometers perform real-time temperature measurements, and the results are controlled by a smart PID and multi-zone SCR, enabling superior temperature control. The vacuum chamber is equipped with an oxygen concentration monitor to support the maintenance of an oxygen-free environment. The Windows-based software is multilingual and allows intuitive operation through a graphical user interface. With a track record of over 500 units shipped, we leverage our process profiling expertise and provide assistance in solving challenges in your process development with a demo environment that is always prepared with five units.

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