Platform for ALD research and batch production.
The "Beneq TFS 500" is suitable for various applications in thin film deposition and is an ideal tool for multi-project environments. Equipped with a manual load lock, it enhances wafer processing capabilities. Different types of reaction chambers can be installed inside the vacuum chamber, allowing each reaction chamber to be optimized according to the customer's needs. Additionally, it can meet both the stringent requirements for industrial reliability and the need for flexibility in R&D operations. The process components ensure the availability of spare parts. 【Products and Services Offered】 ■ 3D and batch production ■ Research equipment ■ Coating services ■ Research and development services *For more details, please download the PDF or feel free to contact us.
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We are a provider of ALD equipment headquartered in Finland. Our mission is to develop high-quality tools for production and research applications, and to create significant technological trends through industrial ALD solutions. Our products are designed to minimize cross-contamination in multi-user research environments. We offer various options and upgrades to meet the most stringent research requirements.