Leave the challenges related to high-purity photoresist liquid manufacturing equipment to Japan Fluorochemical Industry!
Applying fluororesin lining to photoresist liquid manufacturing equipment is expected to provide the following benefits: 1. Improved high purity: It is expected to prevent the leaching of metal ions and enhance purity. 2. Enhanced liquid drainage: Due to its high water repellency, it is expected to reduce the residue of products and cleaning solutions, leading to improved quality and reduced production costs. 3. Chemical resistance: It is expected to protect the substrate from corrosion caused by chemicals, thereby extending the lifespan of the substrate. 4. Prevention of wear particle contamination: By selecting our non-metal PEC specifications, it is expected to prevent the contamination of wear particles generated from the shaft seal of the stirrer. Additionally, there is an antistatic specification that lowers the leakage resistance value of the fluororesin insulating film, allowing static electricity generated during stirring to dissipate in the volume direction, which is expected to prevent explosions and damage to the film and equipment caused by static electricity.
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basic information
Nippon Fuso Kogyo Co., Ltd. provides fluororesin coating and lining for tanks, stirrers, valves, and other equipment used in the manufacturing of photoresist liquids. With over 20 years of extensive experience in lining equipment for photoresist liquid manufacturing, our linings are utilized for various applications, including preventing metal ion elution, corrosion prevention, and improving cleanability for manufacturing equipment used for KrF, ArF, and EUV. We also offer robust support for the production of equipment suitable for lining, so if you have any concerns related to photoresist liquid manufacturing, please feel free to consult with us.
Price information
Please consult with us.
Applications/Examples of results
Equipment for manufacturing photoresists for KrF, ArF, and EUV.
Company information
Our company is an organization that quickly obtained ISO 9001 and 14001, complying with international standards in the industry (fluororesin-related). We are also a technology-leading company that is constantly developing new products.
