Thermal desorption gas analysis of ceramics
Thermally stable α-alumina is used in a wide range of applications, including heat-resistant materials, semiconductor packages, and components of semiconductor manufacturing equipment. Among these, dense α-alumina is also used as a material for vacuum devices. However, the gases generated when such materials are heated can adversely affect products and equipment, making it important to understand the outgassing from these materials. In this report, we present a case study comparing the outgassing amounts of porous and dense α-alumina using TDS analysis (temperature-programmed desorption gas analysis).
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basic information
Measurement method: TDS Product field: Manufacturing equipment, components, LSI, memory Analysis purpose: Trace concentration evaluation, degassing analysis by heating
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Applications/Examples of results
Analysis of manufacturing equipment, parts, LSI, and memory.
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Download All Catalogs![[Analysis Case] Analysis of α-Alumina (α-Al2O3) by TDS_C0578](https://image.mono.ipros.com/public/catalog/image/01/956/483699/IPROS39220823788408216213.jpeg?w=120&h=170)
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!