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  5. controller
  6. Mass Flow Controller "SFC5300"

Mass Flow Controller "SFC5300"

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last updated:Apr 09, 2025

センシリオン
センシリオン
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Introducing MFC for OEM projects with strict cost requirements for mass production!

The "SFC5300" is a mass flow controller capable of measuring and controlling mass flow with excellent accuracy, long-term stability, and reproducibility. Despite its compact size, it can measure over a wide dynamic range, and the body is made of metal. Additionally, the product features a down-mount connection for fluid connections and offers two digital interfaces for connectivity. 【Specifications (partial)】 ■ Full-scale flow: 1, 2, 5, and 10 slm ■ Full-scale flow: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5300"

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  • Related Link - https://sensirion.com/jp/products/product-catalog/…
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【Other Specifications】 ■ Supply Voltage: 14 - 26.4V ■ Average Supply Current: 50000uA ■ Maximum Supply Current: 320000uA ■ Interface: RS485 ■ Size (LxWxH): 48 x 25 x 79.5mm *For more details, please download the PDF or feel free to contact us.

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センシリオン

センシリオン

Electronic Components and Semiconductors

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Sensirion's mission is to provide sensors and sensor solutions with excellent design and reliability, becoming the number one partner for our customers. We aim to elevate the standards of sensor technology by leveraging technology intelligence. In doing so, we contribute to improving the sustainability, efficiency, health, safety, and quality of life for people and businesses. We pursue a common goal of shaping the future of the automotive industry, industrial sectors, building and HVAC technology, medical technology, and consumer electronics through innovation in collaboration with our partner companies and customers. Sensirion was founded in 1998 and currently has about 1,000 employees at its headquarters in Stäfa, Switzerland, and numerous subsidiaries around the world.

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