Control the specific resistance of ultrapure water to solve electrostatic interference in precision cleaning.
Standard precision cleaning is performed using ultra-pure water with almost no ionic components, which can lead to product defects due to static electricity, such as: - Circuit destruction (static breakdown) - Surface charging of the cleaned objects and re-adhesion of fine particles ⇒ MEGCON suppresses static electricity generation by dissolving carbon dioxide in ultra-pure water through a membrane, creating functional water with adjusted resistivity. Based on approximately 7,000 sales records, it contributes to reducing your company's product defects (improving yield). ■ Features Automatic and abundant control methods - Automatic batch resistance control during flow rate fluctuations allows connection to multiple die and cleaning machines. - Three types of control methods can be selected based on distance. Efficient gas supply - Gas consumption is minimized with gas quantity control according to flow rate. (Under conditions of 0.5 MΩ·cm and 9 L/min, gas consumption is 1.62 grams/hour.) - Capable of gas supply in a central system - Gas dissolution through a membrane minimizes the risk of fine particle contamination Rich lineup - Available in large flow type (up to 8,000 L/h) and small flow type (from 30 L/h) - CE marking series available for export to Europe
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basic information
■Liquid Contact Part Cell (Carbon Dioxide Introduction Part): PP ■Utility - Ultra-pure Water Pressure: Normal use 0.35 MPa or below (maximum 0.45 MPa) / Temperature: 5–35℃ / Water Quality: 10 MΩ·cm or higher * The structure prevents ultra-pure water from passing through the hollow fiber membrane, minimizing pressure loss of ultra-pure water entering and exiting the device. - CO2 Gas Pressure: 0.1–0.2 MPa / Temperature: 5–35℃ / Purity: 99.5% or higher - Dry Air (for membrane drying) Not required due to built-in air pump - Power Supply AC100-240V (50/60Hz) ■Standard Accessories - Instruction Manual - Inspection Certificate - 100-120V: Power Cord 2.8m (with plug) - 200-240V: Power Cord 5m (without plug) * The -S type comes with a buzzer, two-color lamp, leveler, and caster. ■Options Many selections available besides the following: - Caster with leveler + Two-color lamp (with buzzer) - CO2 Pressure Switch (for pressure drop detection) - CO2 Drop Alarm Function - CO2 Cylinder Automatic Switching Function - Leak Sensor - PFA Piping - SECS I/F - External Air Supply - Lift Type Angle Chuck Valve
Applications/Examples of results
■Purpose - Cleaning in the dicing process - High-pressure jet cleaning - Scrubber cleaning - Cleaning of LCD panels - Cleaning of photomasks and reticles, etc.
Detailed information
Company information
Our company designs and manufactures pharmaceutical water systems, ultrapure water production systems, membrane process systems, and their application equipment based on the advanced membrane technology we have cultivated over many years. We respond to user needs such as product development, quality enhancement, rationalization, energy conservation, resource saving, and environmental protection. Please feel free to contact us with your requests.