Ultra-pure water anti-static device MEGCON PRC2+ Rack type

Automatically control the specific resistance of ultrapure water to solve static electricity issues in precision cleaning.

Regular precision cleaning involves washing with ultra-pure water that contains almost no ionic components, which can lead to product defects due to electrostatic interference, such as: - Circuit destruction (i.e., electrostatic destruction) - Surface charging of the cleaned items and re-adhesion of fine particles ⇒ MEGCON suppresses the generation of static electricity by dissolving carbon dioxide in ultra-pure water through a membrane, creating functional water with adjusted resistivity. Based on approximately 7,000 sales records, it contributes to reducing your company's product defects (improving yield). ■ Features Automatic and abundant control methods - Automatic batch resistance control during flow rate fluctuations allows connection to multiple die and cleaning machines. - Three types of control methods can be selected based on distance. Efficient gas supply - Gas consumption is minimized through gas quantity control according to flow rate. (Under conditions of 0.5 MΩ·cm, 9 L/min, gas consumption is 1.62 grams/hour.) - Capable of gas supply using a central system. - Gas dissolution through membrane methods minimizes the risk of fine particle contamination. Extensive lineup - Offers large flow types (up to 8,000 L/h) and small flow types (from 30 L/h). - Includes CE-marked series that can be exported to Europe.

Other semiconductor manufacturing equipment