Damage-free cleaning of submicron particles with high frequency from 750 kHz to 3.0 MHz.
We offer the "Fine Series Cleaning Units," including a batch cleaning unit that uses 750kHz. The "Fine Sonic (Batch Cleaning Unit)" efficiently transmits sound waves through a specially designed vibrating element, removing sub-micron particles without damaging the workpiece. Additionally, we provide the "Fine Jet (Spray Cleaning Tool)," suitable for cleaning silicon wafers and photomasks, as well as the "Fine Scall (Shower Cleaning Tool)," which sprays ultra-pure water infused with 1.5MHz sound waves for cleaning. 【Features】 < Fine Sonic > ■ Batch cleaning unit using 750kHz ■ Efficiently transmits sound waves through a specially designed vibrating element, removing sub-micron particles without damaging the workpiece ■ Suitable for cleaning silicon wafers, photomasks, and magnetic disks *For more details, please refer to the related links or feel free to contact us.
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【Other Features】 <Fine Jet> - Pure water infused with sound waves of 400kHz, 1.5MHz, or 3.0MHz is sprayed from the nozzle tip for cleaning. - Cleaning is performed at a flow rate of 0.8 to 1.5 liters per minute. - Since cleaning is done in the air, there is no recontamination, and submicron particles are removed. <Fine Scoal> - Ultra-pure water infused with 1.5MHz sound waves is sprayed from a 2mm wide nozzle slit for cleaning. - The cleaning area can be selected to match the workpiece size, ranging from 250 to 2,210mm. - The bar type allows for high throughput and cleaning of submicron particles. *For more details, please refer to the related links or feel free to contact us.
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For more details, please refer to the related links or feel free to contact us.
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Our company develops, designs, manufactures, and sells various equipment tailored to customer applications and manufacturing lines in the semiconductor, photomask, disk, and lens industries. We specialize in customized production based on customer specifications, providing total support for the product lifecycle from design, development, assembly, inspection, installation, to maintenance. By building close relationships with customers at every stage, we can directly sense the issues and technological trends they perceive, allowing us to quickly initiate development in response.