Acidic liquid compatible TSP pump AC model for semiconductors
Solenoid-driven quantitative diaphragm pump TSP series AC type
Chemical supply in semiconductor manufacturing. Achieving corrosion resistance and high precision.
In the semiconductor industry, the accurate supply of chemicals in the manufacturing process is a crucial factor that affects product quality and yield. Particularly as miniaturization advances, precise quantitative injection of chemicals is required. Inadequate chemical supply can lead to product defects and decreased manufacturing efficiency. Our acid-compatible TSP pump AC model employs materials with excellent corrosion resistance and utilizes a solenoid-driven method to accurately deliver small amounts of chemicals. This contributes to solving the challenges of chemical supply in the semiconductor manufacturing process. 【Application Scenarios】 - Developer supply in photolithography processes - Chemical supply in etching processes - Chemical supply in cleaning processes 【Benefits of Implementation】 - Improved accuracy of chemical supply - Enhanced product quality - Improved yield
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basic information
【Features】 - A corrosion-resistant resin pump capable of transferring various chemicals. - Utilizes a solenoid drive system ideal for accurately dispensing small quantities. - Waterproof performance equivalent to IP65, suitable for outdoor use. - Compatible with power supplies ranging from 100 to 240V. - Features an easy-to-use digital display. 【Our Strengths】 We manufacture and sell industrial equipment and urea water production systems, providing products tailored to our customers' needs.
Price information
Reference price TSP-60,100,200-AC-S: ¥80,000-
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Applications/Examples of results
A corrosion-resistant resin pump capable of transferring various chemicals. Ideal for accurately dispensing small quantities with a solenoid-driven mechanism.
Line up（3）
| Model number | overview |
|---|---|
| TSP-60-AC-S | Maximum discharge volume: 60 mL/min Maximum discharge pressure: 1 MPa Rated voltage: AC 100V to 240V single phase Frequency: 50/60 Hz Transfer liquid temperature: 0 to 40℃ (must not freeze) Material: (liquid contact part) PVC / (diaphragm) PTFE / (packing) VITON Weight: 2.8 kg Connection size (discharge side/suction side) Φ6 × Φ11 Stroke count: 1 to 200 times/min Stroke length: 0.0 to 1.0 mm Transferable viscosity: 100 mPa·s |
| TSP-100-AC-S | Maximum discharge volume: 100 mL/min Maximum discharge pressure: 0.7 MPa Rated voltage: AC 100V to 240V single phase Frequency: 50/60 Hz Transport liquid temperature: 0 to 40°C (must not freeze) Material: (liquid contact part) PVC / (diaphragm) PTFE / (packing) VITON Weight: 2.8 kg Connection size (discharge side/suction side) Φ6 × Φ11 Stroke count: 1 to 200 times/min Stroke length: 0.0 to 1.0 mm Transportable viscosity: 100 mPa·s |
| TSP-200-AC-S | Maximum discharge volume: 200 mL/min Maximum discharge pressure: 0.35 MPa Rated voltage: AC 100V to 240V single phase Frequency: 50/60 Hz Transfer liquid temperature: 0 to 40℃ (must not freeze) Material: (liquid contact part) PVC / (diaphragm) PTFE / (packing) VITON Weight: 2.8 kg Connection size (discharge side/suction side) Φ6×Φ11 Stroke count: 1 to 200 times/min Stroke length: 0.0 to 1.0 mm Transferable viscosity: 100 mPa·s |
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Company information
We are engaged in the manufacturing and sales of industrial machinery and urea water production equipment.
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