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  6. Considerations on Coating Tests for Wafer Polymers for Semiconductor Manufacturing

Considerations on Coating Tests for Wafer Polymers for Semiconductor Manufacturing

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Nanobia Corporation

last updated:Feb 03, 2026

アイ・ティー・エス・ジャパン
アイ・ティー・エス・ジャパン
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Contributing to yield improvement through strength testing, surface inspection, and environmental testing of semiconductors.

In the semiconductor manufacturing industry, improving yield is a critical issue. The quality of metal coatings on wafers significantly affects product reliability and yield. Poor adhesion strength of the coating or incompatibility with the substrate can lead to various problems, potentially lowering yield. By utilizing testing equipment such as the indenter from Nanovia, it becomes possible to detect these issues early and implement countermeasures. 【Application Scenarios】 - Mechanical strength verification of metal coatings on wafers - Evaluation of adhesive failure, cohesive failure, and critical load of polymer coatings - Scratch resistance testing of multilayer thin films - Friction evaluation of self-cleaning glass coatings - Scratch testing under high-temperature conditions 【Effects of Implementation】 - Improved yield through quality assessment of coatings - Enhanced product reliability - Reduction of defective products - Increased efficiency in research and development

    WaferOther semiconductorsSemiconductor inspection/test equipment
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Considerations on Coating Tests for Wafer Polymers for Semiconductor Manufacturing

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  • Nanovia Corporation's Real Nano 3D Profilometer, Nano/Micro Indenter, Custom Tribometer
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【Features】 - Supports various tests such as indentation tests, scratch tests, and reciprocating scratch tests - Evaluates adhesive failure, cohesive failure, and critical load of polymer coatings - Assesses adhesive failure, cohesive failure, and impact on substrates of multilayer thin films - Capable of friction evaluation for self-cleaning glass coatings - Supports testing in high-temperature environments (up to 1,100°C) 【Our Strengths】 We handle products adopted by world-class companies. We provide rapid support comparable to domestic manufacturers even for overseas products.

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Strength testing, surface inspection, environmental testing of semiconductors, etc.

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Wafer metal coating material (indenter)

Wafer metal coating material (indenter)

TECHNICAL
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Micro-scratch test (indenter) on silicon wafer coating agents.

Micro-scratch test (indenter) on silicon wafer coating agents.

TECHNICAL
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Evaluation of multilayer thin film coatings (indenter)

Evaluation of multilayer thin film coatings (indenter)

TECHNICAL
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Measurement of transparent film on a transparent substrate

Measurement of transparent film on a transparent substrate

TECHNICAL
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Surface inspection of microspheres (3D profiler)

Surface inspection of microspheres (3D profiler)

TECHNICAL
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Verification of tooth wear using real 3D surface inspection (3D profiler)

Verification of tooth wear using real 3D surface inspection (3D profiler)

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Verification of processed parts and CAD models (3D profiler)

Verification of processed parts and CAD models (3D profiler)

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1000℃ Brinell hardness test NanoVia tribometer

1000℃ Brinell hardness test NanoVia tribometer

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Company information

アイ・ティー・エス・ジャパン

アイ・ティー・エス・ジャパン

Testing, Analysis and Measurement

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Our company handles products that are adopted by world-class companies. These products incorporate cutting-edge technologies not found in Japanese products, enabling the promotion of rationalization and cost reduction in manufacturing and development environments, and they are guaranteed to bring benefits to the companies that implement them. Additionally, we provide support for overseas products with the same rapid response as domestic manufacturers. ◎ Dynamic viscoelasticity measurement device ◎ Stress relaxation measurement device ◎ Drop weight impact testing machine ◎ Multicolor light 3D optical profiler ◎ Nano/micro indenter ◎ Tribometer ◎ Moisture meter for polymers ◎ Twin capillary rheometer for melt property material development ◎ Flow analysis software ◎ Molding analysis software ◎ Ultra-precision feeder ◎ Mass flow quantitative feeder ◎ Automatic adjustment weight-type blender ◎ Dehumidifying dryer for polymers ◎ Color spectrometer ◎ Equipment for shortening molding cycles ◎ Rubber measurement-related equipment  Dynamic measurement + vulcanization testing machine  Rheometer  Carbon dispersion meter  Mooney viscometer  Hardness and density meter  Density and specific gravity meter  Specific gravity meter for uncured rubber  Durometer  Durability and fatigue testing machine  Rebound tester  Wear testing machine ◎ Comprehensive valve manufacturer

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