N-111 for precision positioning, semiconductor technology, and wafer inspection for semiconductors.
NEXLINE(R) OEM Linear Actuator N-111
Long-distance nanopositioning PiezoWalk® drive. High resolution and compact design.
In semiconductor manufacturing equipment and inspection devices, high-precision positioning at the nanometer level significantly impacts product quality and yield. In particular, slight positioning errors in fine processing, wafer inspection, and measurement processes can lead to a decline in device performance or defects. The N-111 is a linear actuator that utilizes PI's proprietary NEXLINE(R) PiezoWalk(R) walking drive technology. It achieves high resolution at the nanometer level while maintaining a long stroke, enabling high-precision positioning in semiconductor manufacturing equipment and precision inspection devices. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection equipment - Nano measurement devices - Fine processing equipment - Precision positioning applications 【Benefits of Implementation】 - Improved quality through high-precision positioning - Increased yield - Enhanced productivity
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basic information
【Features】 - Stroke: 5 mm - Resolution: 0.025 nm (open loop), 5 nm (closed loop) - Thrust: up to 40 N, holding force: up to 60 N - Self-locking when stationary (no power required, no heat generation) - Compatible for use in non-magnetic and vacuum environments 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience with our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, utilizing our precision control technology. With a rich lineup and technical expertise, we offer optimal solutions tailored to our customers' needs.
Price information
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Applications/Examples of results
Application examples - Semiconductor manufacturing - Semiconductor testing - Wafer inspection - Nano lithography - Nano imprinting - Nano measurement - Active vibration damping - Operation in strong magnetic fields
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
