High-Resolution Capacitive Sensors for Precision Machinery D-050・D-100
Capacitive Sensor D-050・D-100
Non-contact displacement sensor with a measurement range of up to 300µm and a resolution of 0.01nm.
In the field of precision machinery, high-precision displacement measurement at the nanometer level is required to enhance product performance and processing accuracy. Particularly in high-precision positioning, microfabrication, and precision measurement, it is crucial to accurately measure even slight changes in displacement. Insufficient measurement accuracy can lead to a decline in product quality and variations in equipment performance. The D-050 / D-100 is a high-resolution sensor that employs a capacitive method for non-contact displacement measurement. With a maximum resolution of 0.01nm, it enables precise displacement measurement at the nanoscale, contributing to high-precision position control in precision machinery and precision measurement systems. 【Application Scenarios】 - Precision positioning devices - Precision measurement instruments - Semiconductor manufacturing equipment - Nano positioning systems - Precision measurement in clean environments 【Benefits of Implementation】 - High-precision displacement measurement at the nanometer level - Reduced impact on the object being measured due to non-contact measurement - Realization of high-precision positioning control - High-precision feedback control in multi-axis systems
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basic information
【Features】 - Ideal for applications requiring high precision - Measurement range: up to 0.01nm - Resolution: 0.01nm - Linearization with digital controller: up to 0.01% - Bandwidth: up to 10kHz 【Our Strengths】 Based on over 50 years of experience from our headquarters in Germany and 30 years of experience from our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, utilizing our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions tailored to our customers' needs.
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- High-precision positioning and measurement *For more details, please refer to the catalog or feel free to contact us.
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
