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  6. D-510 Sub-Nanometer Resolution Capacitive Displacement Sensor for Research and Development

D-510 Sub-Nanometer Resolution Capacitive Displacement Sensor for Research and Development

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PISeca Single Electrode Capacitive Sensor D-510

last updated:Mar 16, 2026

PI Japan
PI Japan
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Achieving sub-nanometer resolution and a maximum bandwidth of 10 kHz for non-contact displacement measurement at the nano level.

In the field of research and development, there is a demand for the precise measurement of nanoscale minute displacements and vibrations. Particularly in research on nano-measurement and precision positioning, high-resolution and high-response sensors significantly influence experimental accuracy and reproducibility. The D-510 is a high-resolution sensor that employs a capacitive method for non-contact displacement measurement. With sub-nanometer resolution and a high bandwidth of up to 10 kHz, it enables the measurement of nano-level displacements and high-dynamics vibrations. It is ideal for high-precision measurements and nano-positioning control in research and development applications. 【Application Scenarios】 - Nano-positioning research - Material property evaluation - Precision vibration measurement - Nanometrology - Precision measurement instruments for research 【Benefits of Implementation】 - High-precision displacement measurement at the nano level - Reduced impact on samples due to non-contact measurement - Analysis of dynamic behavior through high-bandwidth measurement - Improved reproducibility and reliability of experimental data

    Converters and TransducersOther electronic partsSensors
csm_PI_D-510.jpg_Bilder-Web_4a0e113c59.jpg

D-510 Sub-Nanometer Resolution Capacitive Displacement Sensor for Research and Development

csm_PI_D-510.jpg_Bilder-Web_4a0e113c59.jpg
csm_PI_D-510.jpg_Bilder-Web_4a0e113c59.jpg
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**Features** - Non-contact measurement of distance/movement/vibration - Absolute position detection - Sub-nanometer resolution - Measurement range up to 500μm - Easy to integrate **Our Strengths** Based on over 50 years of experience from our headquarters in Germany and 30 years of experience from our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we offer optimal solutions tailored to our customers' needs.

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- Semiconductor manufacturing/testing and measurement - Precision machining *For more details, please refer to the catalog or feel free to contact us.

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Single Electrode Capacitive Sensor D-510 PISecaTM

Single Electrode Capacitive Sensor D-510 PISecaTM

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2 Electrode Capacitive Sensor D-050/D-100

2 Electrode Capacitive Sensor D-050/D-100

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Company information

PI

PI Japan

Electronic Components and Semiconductors

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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.

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