Capacitance Sensor D-510 for Semiconductor Device Nano Displacement Measurement

Sub-nanometer resolution and a maximum bandwidth of 10 kHz. Non-contact capacitive sensor ideal for wafer position control.

In semiconductor manufacturing, even slight displacements or vibrations of the wafer stage and precision positioning mechanisms can significantly impact processing accuracy and product yield. As semiconductor processes continue to miniaturize, it is crucial to measure displacements at the nanometer level with high precision. The D-510 PISeca is a high-resolution sensor that employs capacitive non-contact displacement measurement. With sub-nanometer resolution and high-bandwidth measurements of up to 10 kHz, it accurately detects minute displacements of the wafer stage and equipment vibrations, contributing to enhanced position control accuracy and process stabilization in semiconductor manufacturing equipment. 【Application Scenarios】 - Position feedback for wafer stages - Nano position control for semiconductor manufacturing equipment - Vibration measurement of wafer surfaces - Precision alignment systems - Semiconductor inspection equipment 【Benefits of Implementation】 - High-precision displacement measurement at the nanometer level - Reduced impact on wafers through non-contact measurement - High-precision monitoring of equipment vibrations - Stabilization of semiconductor processes and improvement of yield

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