A model that combines a membrane attachment method compatible with TAIKO(R) wafers and a heating function.
The "TV-200TH" is a vacuum mount that combines a membrane bonding method compatible with TAIKO(R) wafers and a heating function. By applying radial bonding in a vacuum environment, it suppresses stress concentration on the unique outer edge steps and thin sections of TAIKO(R) wafers, and by stabilizing the properties of the adhesive tape with a heated chuck, it achieves high bonding uniformity and reproducibility. This is the top model designed for processes with high difficulty, such as thin wafers and high-value-added devices. 【Compatible wafer size】 TV-200TH: 200mm (8 inches) *TAIKO(R) is a registered trademark of Disco Corporation in Japan and other countries.
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■Main Features TAIKO(R) Compatible Membrane Attachment Method Pressure is transmitted through a flexible membrane, allowing it to uniformly conform to wafers with steps and curved surfaces. Low Stress through Radial Attachment By progressing the attachment from the center to the outer circumference, stress concentration at the outer edge and air bubble inclusion are suppressed. Heated Chuck Equipped By heating the attachment stage, the fluidity of the adhesive tape is controlled, stabilizing the attachment quality. Integrated Management of Vacuum, Temperature, and Time Key process conditions are managed numerically, achieving high process reproducibility. ■Main Specifications Frame Size: DTF2-8-1 Maximum Temperature: Up to 100°C Device Dimensions: 360mm(W) × 600mm(D) × 815mm(H) Weight: 29kg Required Vacuum Level (Absolute Pressure): 0.2 kPa Recommended Exhaust Rate: Approximately 320 L/min (19 m³/h) Required Air Pressure: 0.4 to 0.6 MPa Input Power <Main Unit> AC100V 50/60Hz X 1 <Temperature Controller> AC110V 50/60Hz X 1
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Top model for processes with high difficulty, such as thin wafers and high-value-added devices, using TAIKO(R) + heating + vacuum bonding.
Line up（4）
| Model number | overview |
|---|---|
| TV-150 / TV-200 / TV-300 | Standard model |
| TV-200H / TH-300H | Heating model |
| TV-200T | TAIKO(R) wafer-compatible model |
| TV-200TH | TAIKO(R) Wafer and Heating Compatible Model |
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Company information
Techno Vision Co., Ltd. has been engaged in the development, manufacturing, and import/export of its own products, focusing on cleaning technology and assembly technology since its establishment in September 1987. In today's high-tech industry, we are committed to responding to our customers' needs and providing technology, products, and services from the perspective of our customers.
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