Ultra-compact MFC "GC Series" supporting the development of decarbonization and environmentally friendly technologies.

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last updated：Apr 16, 2026

ITWジャパン

Achieving high reproducibility and space-saving in small flow domains. Ultra-compact mass flow controllers that support research and development for CO₂ reduction, exhaust gas treatment, and alternative fuel evaluation.

In the field of research and development in chemistry, materials, and energy, the development of environmental technologies is advancing, focusing on CO₂ reduction, exhaust gas treatment, and alternative fuel evaluation. The GC series is a MEMS-based ultra-compact mass flow controller that achieves high reproducibility in the small flow range required for these applications, along with stable gas control in a space-saving design. It supports gases such as Air, N₂, O₂, CO₂, Ar, CO, CH₄, C₃H₈, and N₂O, with a full-scale flow rate of 210 to 5000 sccm (Air equivalent), a control range of 100:1, a reproducibility of ±0.25% S.P., and a response time of less than 2 seconds (when the set value exceeds 10% of full scale). It is suitable for laboratory equipment, small test devices, and analytical facilities, and can be utilized as a gas control technology that supports the development of environmental technologies themselves.

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basic information

- Full-scale flow rate: 210–5000 sccm (Air equivalent) - Control range: 100:1 - Reproducibility: ±0.25% S.P. - Response time: Less than 2 seconds (when the set value exceeds 10% of full scale) - Communication: Modbus RTU (RS-485) - Analog I/O: 0–5V, 0–10V, 4–20mA, 0–20mA - Operating temperature range: 0–50℃ ■ Features - Ultra-compact mass flow controller using MEMS sensors - Full-scale flow rate of 210–5000 sccm (Air equivalent) - Control range of 100:1 - Reproducibility of ±0.25% S.P. - Response time of less than 2 seconds (when the set value exceeds 10% of full scale) - Compatible with Modbus RTU (RS-485) and analog I/O - Space-saving design suitable for integration into laboratory equipment and small test devices ■ Compatible gases Air, N₂, O₂, CO₂, Ar, CO, CH₄, C₃H₈, N₂O

Price information

Please check the materials for details on specifications, applicable gases, and examples of use. We also accept inquiries regarding applicability and flow specifications.

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Applications/Examples of results

- CO₂ capture and reuse evaluation - Exhaust gas simulation testing - Combustion and catalyst evaluation - Alternative fuel evaluation - CO₂ separation and adsorption evaluation - Gas control for analytical devices - Atmosphere control in materials and steelmaking fields - Lab-scale reaction evaluation - Integration into small test devices and OEM equipment ■ Addressing these challenges - Difficulty in achieving reproducibility in low flow ranges - Limited space within the equipment - Desire for stable gas control for research applications in environmental and decarbonization fields - Looking for small MFCs for exhaust gas treatment, combustion, and CO₂ evaluation ■ Features of the GC series The GC series is an ultra-compact thermal mass flow controller that employs MEMS sensors. It supports gases such as Air, N₂, O₂, CO₂, Ar, CO, CH₄, C₃H₈, and N₂O, with a full-scale flow rate of 210 to 5000 sccm (Air equivalent), a control range of 100:1, and a reproducibility of ±0.25% S.P. As a small gas control device supporting research and development of decarbonization and environmental technologies, it contributes to space-saving of equipment and efficiency in condition setting.