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  6. Ultra-compact MFC "GC Series" supporting the development of decarbonization and environmentally friendly technologies.

Ultra-compact MFC "GC Series" supporting the development of decarbonization and environmentally friendly technologies.

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last updated:Apr 16, 2026

ITWジャパン
ITWジャパン
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Achieving high reproducibility and space-saving in small flow domains. Ultra-compact mass flow controllers that support research and development for CO₂ reduction, exhaust gas treatment, and alternative fuel evaluation.

In the field of research and development in chemistry, materials, and energy, the development of environmental technologies is advancing, focusing on CO₂ reduction, exhaust gas treatment, and alternative fuel evaluation. The GC series is a MEMS-based ultra-compact mass flow controller that achieves high reproducibility in the small flow range required for these applications, along with stable gas control in a space-saving design. It supports gases such as Air, N₂, O₂, CO₂, Ar, CO, CH₄, C₃H₈, and N₂O, with a full-scale flow rate of 210 to 5000 sccm (Air equivalent), a control range of 100:1, a reproducibility of ±0.25% S.P., and a response time of less than 2 seconds (when the set value exceeds 10% of full scale). It is suitable for laboratory equipment, small test devices, and analytical facilities, and can be utilized as a gas control technology that supports the development of environmental technologies themselves.

    Flow MeterOther inspection equipment and devices
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Ultra-compact MFC "GC Series" supporting the development of decarbonization and environmentally friendly technologies.

  • GC mass flow controller
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basic information

- Full-scale flow rate: 210–5000 sccm (Air equivalent) - Control range: 100:1 - Reproducibility: ±0.25% S.P. - Response time: Less than 2 seconds (when the set value exceeds 10% of full scale) - Communication: Modbus RTU (RS-485) - Analog I/O: 0–5V, 0–10V, 4–20mA, 0–20mA - Operating temperature range: 0–50℃ ■ Features - Ultra-compact mass flow controller using MEMS sensors - Full-scale flow rate of 210–5000 sccm (Air equivalent) - Control range of 100:1 - Reproducibility of ±0.25% S.P. - Response time of less than 2 seconds (when the set value exceeds 10% of full scale) - Compatible with Modbus RTU (RS-485) and analog I/O - Space-saving design suitable for integration into laboratory equipment and small test devices ■ Compatible gases Air, N₂, O₂, CO₂, Ar, CO, CH₄, C₃H₈, N₂O

Price information

Please check the materials for details on specifications, applicable gases, and examples of use. We also accept inquiries regarding applicability and flow specifications.

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Applications/Examples of results

- CO₂ capture and reuse evaluation - Exhaust gas simulation testing - Combustion and catalyst evaluation - Alternative fuel evaluation - CO₂ separation and adsorption evaluation - Gas control for analytical devices - Atmosphere control in materials and steelmaking fields - Lab-scale reaction evaluation - Integration into small test devices and OEM equipment ■ Addressing these challenges - Difficulty in achieving reproducibility in low flow ranges - Limited space within the equipment - Desire for stable gas control for research applications in environmental and decarbonization fields - Looking for small MFCs for exhaust gas treatment, combustion, and CO₂ evaluation ■ Features of the GC series The GC series is an ultra-compact thermal mass flow controller that employs MEMS sensors. It supports gases such as Air, N₂, O₂, CO₂, Ar, CO, CH₄, C₃H₈, and N₂O, with a full-scale flow rate of 210 to 5000 sccm (Air equivalent), a control range of 100:1, and a reproducibility of ±0.25% S.P. As a small gas control device supporting research and development of decarbonization and environmental technologies, it contributes to space-saving of equipment and efficiency in condition setting.

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[Instruction Manual] GC Series Mass Flow Controller

[Instruction Manual] GC Series Mass Flow Controller

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Product Catalog: GC Series Mass Flow Controller

Product Catalog: GC Series Mass Flow Controller

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Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

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Service & Support

Service & Support

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Gas flow control supports the development of decarbonization and environmental technologies (Brooks Instrument's solutions).

Gas flow control supports the development of decarbonization and environmental technologies (Brooks Instrument's solutions).

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Company information

ITWジャパン

ITWジャパン

Machine elements and parts

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Our company provides products used in various fields, including heavy industry, oil and gas refining, research in chemistry and petrochemicals, production of pharmaceuticals and biopharmaceuticals, as well as manufacturing equipment for solar cells, LEDs, thin films, optical fibers, and semiconductors. By contributing to the environmental settings that enable process control and accurate measurements, we enhance the precision of our customers' processes, continuously supporting them to maintain their competitiveness while striving for mutual improvement, leading to the development and growth of their businesses. Please feel free to consult us if you have any requests.

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