Accurately apply particles for inspection device evaluation.
MSP Corporation is a company that provides high-precision particle coating technology for the semiconductor and device fields. Centered around its patented DMA classification technology, it offers particle coating equipment and coating services that can control particle size and the number of coatings with high reproducibility. Regarding particle coating services, a range of service menus is available according to applications, including coating for evaluation and verification wafers, coating for photomasks, PRE coating for cleaning equipment evaluation, and SPx coating wafers for surface inspection equipment calibration. These coatings are performed using NIST-traceable standard particles, and accompanying materials such as scan results and coating reports can also be provided.
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basic information
■Particle Types - PSL (Polystyrene Latex) - SiO₂ (Silica) - Process Particles (AlF₃, Al₂O₃, Ni, Ru, Si, Si₃N₄, Sn, Ti, Ta, TiN, TiO₂, W, Y₂O₃) ■Particle Size - PSL: 10 to 20,000 nm - SiO₂: 10 to 16,000 nm - Process Particles: Consultation required ■Coating Patterns - Spot, Full Area, Ring, Edge Arc ■Number of Coatings - Spot/Ring/Edge Arc: 400 to 25,000 per spot - Full Area: 400 to 50,000 ■Spot Diameter - Standard: φ15 to 35 mm (dependent on particle size) ■Accuracy - Number of Coatings: ±30% - Spot Diameter: ±20% ■Accessories - Certificate of used particles - Coating report - Scan results from KLA Tencor SP2
Price information
We will provide a quote after you provide the recipe information, the number of spots and application coordinates, and the number of substrates.
Delivery Time
※Approximately 3 to 4 months after the order is received or after the coated substrate arrives at MSP Corporation.
Applications/Examples of results
■PRE Coating Service (for Cleaning Device Evaluation) - Minimum order quantity: 25 pieces - Particles: PSL or SiO₂ - Particle size: 40 to 1500 nm - Coating pattern: Full area or single spot - Number of coatings: 400 to 20,000 pieces - Substrate: 300mm wafers in FOUP (provided by the customer) - Delivery time: Approximately 3 months ■SPx Coating Service (for KLA Surfscan SP1/SP2 Calibration) - Substrate: 200mm or 300mm Si wafers provided by MSP - Particles: PSL - Coating pattern: Multi-spot or full area - Particle size: 40 to 3040 nm (specified for each model) - Accessories: Coating report, PSL calibration certificate, traceability - Delivery time: Approximately 3 weeks
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Company information
GSI Creos is a unique "business creation trading company" that builds mechanisms for creating new value together with our business partners in the fields of textiles, focusing on innerwear-related products, and industrial products, focusing on chemical-related products. In the textile field, we integrate our development and procurement capabilities for differentiated materials, coordination of production and logistics, and analysis of customer information to provide raw materials and products that meet market needs, particularly in areas such as innerwear, legwear, and outerwear. In the industrial products sector, we leverage our domestic and international networks to offer high-value-added and unique products in the fields of chemicals, machinery and materials, and hobbies and lifestyle. As a strategic business, we are focusing on the development and commercialization of products that bring groundbreaking added value in the field of nanotechnology, where a material revolution is anticipated. Our slogan is "Produce the Future," and we are also attentive to environmental issues, contributing to the realization of a richer society.
