Introducing HMDS treatment, which is said to improve the adhesion of the resist!
We would like to introduce our "Surface Treatment Technology." Hydrophobic surface treatment, also known as HMDS treatment, is a process to make the wafer surface hydrophobic. It is an essential treatment when the developer solution is aqueous (such as when using positive photoresist). HMDS stands for hexamethyldisilazane, which is a substance that binds methyl groups (―CH3) to the surface of Si wafers. 【Features】 ■ Treatment to make the wafer surface hydrophobic ■ Prevents the penetration of developer solution by hydrophobizing the wafer surface ■ Improves the adhesion of the photoresist *For more details, please refer to the related links or feel free to contact us.
Inquire About This Product
basic information
For more details, please refer to the related links or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the related links or feel free to contact us.
Company information
Riso Tech Japan, since its establishment, has been a specialist in lithography, providing not only resist exposure/development analysis equipment, resist coaters/developers, and lithography simulators, but also evaluation of exposure/development materials for cutting-edge lithography processes. In particular, for resist processing equipment, we propose optimal specifications tailored to customer needs, adapting spin coaters, developers, bake (PEB) equipment, and film thickness measurement to various fields, ranging from development experimental equipment to fully automated production systems. For example, we offer coating equipment for various substrates such as ultra-thin silicon wafers, various compound semiconductors, quartz, sapphire, and piezoelectric substrates (SAW), including ArF resist, EB resist, high-viscosity thick-film resist, polyimide, insulating films, and wax, as well as development equipment for alkaline, inorganic, and organic materials. Additionally, we provide various process units such as HMDS treatment, vacuum bake, UV irradiation, and high-temperature bake processing.
