A case where the uniformity of "atari" was regularly checked, enabling production with stable quality!
We will introduce a case study using "Presscale" to verify the uniformity of the contact of CMP polishing heads in semiconductor manufacturing. Traditionally, the uniformity of contact between silicon wafers and polishing pads was managed retrospectively based on polishing results. This led to issues such as frequent production of defective products, as the causes of polishing defects remained unclear while production continued. By using Presscale, it is possible to verify the pressure distribution on silicon wafers under actual usage conditions. Gaining useful insights into polishing uniformity and adjusting polishing speed can lead to time savings and quality improvements. 【Case Overview】 ■ Objective: Verification of the uniformity of contact of CMP polishing heads ■ Measurement Target: CMP polishing heads ■ Application: Verification of the uniformity of contact of CMP polishing heads ■ Results: Reduction in polishing time, improvement in polishing quality, enhancement of equipment shipment acceptance quality ■ Challenges: Issues such as insufficient accuracy and frequent occurrence of defective products *For more details, please download the PDF or feel free to contact us.
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【Introduction Effects】 ■Time Loss Effect: The uniformity of "hits" can be adjusted during the design phase, significantly improving design efficiency. ■Quality Loss Effect: The uniformity of "hits" can be regularly checked during maintenance, allowing for production with stable quality. *For more details, please download the PDF or feel free to contact us.
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Our Measurement Film Solutions Division offers a variety of products, including high-temperature press scales and UV scales. We have the film "Press Scale," which allows for easy confirmation of invisible pressure and pressure distribution, and the revolutionary thermal distribution visualization film "Thermo Scale," which enables simple judgment of thermal distribution through color changes. Additionally, we provide a wide range of excellent inspection and measurement products that enhance precision, efficiency, and stability in manufacturing, inspection, and testing processes, all developed from the production processes of Fujifilm products.
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