Do you know the cause of the flatness and the deformation of the grinding pad shape?

To prevent deterioration of scratches, parallelism, and rate reduction, first check for shape changes.

In double-sided lapping and polishing processes, as the machining continues, the reference plate and polishing pad wear down, leading to changes in their shapes. The amount of wear varies due to factors such as workpiece placement, load, and variations in rotation direction and speed, which can result in deformations such as convex shapes, concave shapes, hull shapes, and seagull shapes. If shape changes are left unaddressed, they can lead to scratches, deterioration of parallelism, decreased processing rates, and worsened yield. The linked article explains the causes of shape degradation in reference plates and polishing pads, as well as the concepts of reference plate management for stable polishing processes. 【Features】 ■ Explanation of the causes of shape degradation in reference plates and polishing pads ■ Measures against scratches in double-sided lapping and polishing processes ■ Identification of causes for deterioration of parallelism, decreased rates, and worsened yield ■ Organization of convex shapes, concave shapes, hull shapes, and seagull shapes ■ Basic knowledge before considering reference plate measurement and correction *For more details, please refer to the related links or feel free to contact us.

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