"Environmentally Resistant Double Glass Tube Type Hot Air Heater" DGH-140X6
Heat-tech - "Double-walled glass tube type hot air heater for environmental resistance" DGH-140X6
Since it does not emit dust from the heating element, it is ideal for use in clean rooms.
The DGH series has both the heating element and the thermocouple sealed in a quartz glass capsule. Therefore, the heating element and the thermocouple do not come into direct contact with the heated gas, preventing dust from oxides generated by these components from contaminating the heated gas. Although the outer diameter is small, it can heat the passing gas to approximately 550°C. Since it does not generate dust from the heating element, it is ideal for use in clean rooms. Six heating elements are incorporated into a metal tube case with a diameter of φ101.6. The large tube diameter reduces pressure loss. Please consider it when a gas flow rate of 800 liters/min is required. Using the thermocouple at the outlet, accurate temperature control can be performed. The tip has internal threads, allowing various fittings to be attached. The DGH-140X6 can accommodate a terminal box. For safety and health measures, the temperature of the heating element can be monitored to prevent overheating.
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basic information
Six heating elements have been incorporated into a φ101.6 metal tube case. Please check the details on the website below: https://www.heat-tech.biz/products-nh/nh-ss/nph-gj-gz/871.html
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Applications/Examples of results
Preheating of printed circuit boards Drying of silicon wafers Heat source for silicon wafer measurement systems Nitrogen drying of silicon wafers
Detailed information
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Drying of Silicon Wafers Issues The conventional method was problematic because the drying air contained metal ions. ⇒ Improvement Points Heated and dried using a cleanroom specification hot air heater. Since the heater is glass-coated, the content of metal ions has been reduced.
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Heat source for the measurement system of silicon wafers Issues There was no good method to easily heat silicon wafers, which was problematic. ⇒ Improvement points High-temperature nitrogen gas was injected using a hot air heater, raising the top surface temperature to 400°C. It became possible to measure the wafers without the need for a vacuum.
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Nitrogen Drying of Silicon Wafers Issues Natural drying left water spots that were concerning. ⇒ Improvement Points Heated nitrogen was used for drying with a hot air heater. Water spots were eliminated, and there was no oxidation, resulting in improved quality.
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5 reasons that HEATTECH is selected 1. The rich selection of 5 principles and 71 types. Air Blow heater , Near-infrared, Middle-infrared, Far-infrared, and UV heater From the 71 types of products based on the 5 principles of heating system, we will propose the best heater. 2. 9 series 88 types of heater controllers. Manual, Automatic, Speed proportional, Remote control, IOT compliant, Noncontact heating control, One-shot heating, Multistage heating, etc. We propose the optimal heater controller from the multifunctional products. 3. Construction method study materials We have published a number of technical documentation online seminars. 4. Sense of security of verification before introduction. Test piece, test laboratory, in user can verify before introduction. 5. Low-budget one-stop introduction To introduce in testing way, the laboratory kit which gathered something necessary was prepared. : Member of the Kobe Chamber of Commerce and Industry : Member of the Society of Material Science Japan : Member of the Society of Thermophysical Properties Japan : Member of the Japan External Trade Organization Trade Tie-up Promotion Program




