Adopted as the standard specification for CMP devices! High corrosion-resistant PFA coating that withstands harsh environments.
Fluororesin coating
[Improvement of Equipment Reliability] Achieving both prevention of slurry adhesion and measures against chemical corrosion. Adopted as standard parts by equipment manufacturers! We accept prototypes and test construction.
In the design and development of advanced semiconductor manufacturing equipment, measures against chemical corrosion and the maintenance of cleanliness are the most critical design challenges that affect the reliability of the equipment. ■ Issues of slurry adhesion and corrosion resistance in the CMP process The head parts of CMP (Chemical Mechanical Polishing) equipment, which face the wafer at a close distance, are constantly exposed to splashes of slurry containing acids and alkalis, as well as intense corrosion stress, making it difficult to maintain long-term quality with simple water-repellent treatments. ■ PFA coating with fluoropolymer It possesses chemical stability that does not react with almost all chemical substances, completely preventing the leaching of impurities due to metal substrate corrosion. Additionally, due to its strong adhesion and uniform coating formation technology, it exhibits long-lasting corrosion resistance and non-stick properties even for complex-shaped parts. Its high reliability has been recognized, and it boasts a track record of being officially adopted as "standard specification parts" by equipment manufacturers. From head parts to surrounding covers and flow path components, it enhances the overall reliability of the equipment and enables differentiation.
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basic information
【Product Specifications】 ■ Material: PFA (Perfluoroalkyl Vinyl Ether Copolymer) ■ Key Features: Chemical resistance (corrosion resistance), non-stick properties, high purity, low dust generation 【Technical Features】 ■ Optimal Coating Design Optimization of PFA grade according to chemical type, operating temperature, and cleaning conditions ■ Complex Shape Compatibility Formation of a coating without pinholes on inner surfaces of flow paths, fine holes, and curved parts ■ Standard Parts Quality Meets strict cleanliness standards and adhesion strength criteria 【Supported Services】 ■ Proposal of coating specifications from the design stage ■ Prototype construction for actual machine verification (test coating) and evaluation support
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Applications/Examples of results
【Applications】 ■ Semiconductor and electronic component manufacturing equipment (CMP, wafer cleaning, etching, exposure, etc.) ■ Chemical nozzles, head parts, flow path blocks, chamber inner walls, splash prevention covers 【Adoption Results and Implementation Effects】 ■ Challenge: In the development of CMP equipment, there was a need for surface treatment of parts that could highly balance the prevention of slurry adhesion (scratch countermeasures) and chemical corrosion measures (contamination prevention). ■ After Implementation: Actual machine evaluations showed a significant reduction in slurry adhesion, achieving passing standards in chemical resistance and cleanability. PFA-coated parts were decided to be adopted as the "official standard parts" of the equipment. ■ Effect: The quality and durability of the equipment itself improved, and the adoption was horizontally expanded to other parts within the equipment, such as surrounding covers and flow path components.
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Company information
Nikken Coating Industry Co., Ltd. has been a specialized manufacturer of functional coatings for contract processing, earning the trust of customers across various industries for 79 years since its founding. We leverage our processing technology to maximize the properties of fluororesins, such as non-stick, lubricity, and chemical resistance, providing high-performance coatings that directly address customer challenges, including "Thermo Pro Release" for thermal welding processes and "NonStick STC" for blades and precision molds. In recent years, in response to movements regarding regulations on fluorinated compounds (PFAS), "PEEK resin," which is gaining attention as a substitute for fluororesins, has become a focus. Nikken Coating Industry commercialized the world's first PEEK resin coating, "PEEKCOAT," in 1999. Based on the solid knowledge and know-how accumulated over more than 20 years, we are further intensifying our research and development efforts to explore the potential of next-generation PEEK coatings! We aim to be recognized as "the go-to for PEEK coatings" and will continue to lead the way. As "the best partner for functional coatings that builds trust through technology," Nikken Coating Industry will continue to contribute to the creation of high-quality, high-performance products.
