Thin stage with ultra-large aperture equipped with a linear motor.
A super-thin rotating stage with a super-large aperture utilizing a linear motor. Leveraging its features, it is suitable for alignment and active viewing when combined with a monolithic XY stage. Recommended for fine adjustments of large wafers! Please be sure to watch the video.
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basic information
Aperture Diameter: φ56～312mm Resolution: 0.01-0.04 arc-sec Repeatability: ～ ±30nm ■ Achieved ultra-thin rotating stage! By using a linear motor for the drive, we have created an ultra-thin rotating stage with sub-second angular repeatability. Its thickness is just 36mm! ■ High-performance motor/optical encoder adopted By using products from top manufacturers in Europe and the U.S., we achieve not only precision but also high reliability. MTBF > 100,000h. ■ Direct assembly possible with various stages. It is possible to directly attach over 400 types of stages without using adapter plates. This will be a multi-axis stage system compliant with 6D Point Precision. ● For more details, please contact us or download the catalog.
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For fine-tuning applications of large wafers, please contact us for more details or download the catalog.
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