To semiconductor and LCD inspection equipment! Thick-film PEEK coating compatible with large components.
PEEKCOAT
Numerous achievements in the semiconductor and FPD industries. We solve issues related to scratches, distortions, and cost challenges for stages, hands, and tanks. We are also accepting orders for prototype construction of large works ranging from 1 to 2 meters!
In semiconductor and liquid crystal (FPD) manufacturing and inspection equipment, where high cleanliness and micron-level precision are required, the surface treatment of stages and transport components that come into direct contact with the workpiece significantly affects the reliability of the equipment. Our company offers contract processing solutions for large precision components using high-performance PEEK coating "PEEKCOAT." [Our Strengths and Value Proposition] ■ Large Equipment Available We can perform bulk processing of large stages and long arms sized 1 to 2 meters. ■ "Thick Film + Post-Processing" Technology By baking a PEEK coating film of over 1mm and then finishing it with precision machining, we achieve both stringent dimensional accuracy and smooth surface protection performance. ■ Advanced Distortion Control We possess specialized jig technology that suppresses deformation and shrinkage stress of the substrate due to firing heat of approximately 400°C. [Horizontal Expansion and Abundant Processing Achievements] We have numerous surface treatment achievements for various components in semiconductor and liquid crystal equipment, including inspection stages, transport hands, CMP peripheral components, cleaning and etching tanks, piping, and chambers. Please feel free to consult us for test processing (prototyping) tailored to your challenges.
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basic information
【Processing Specifications】 ■ Coating Type High-performance PEEK coating "PEEKCOAT" series (thick film specification) ■ Standard Film Thickness 1mm or more (thick film application considering machining allowance) ■ Compatible Substrates Aluminum, stainless steel (SUS), etc. ■ Compatible Sizes Large manufacturing equipment parts and stages in the 1 to 2m class 【Coating Characteristics】 ■ Excellent wear resistance, heat resistance, mechanical strength, and electrical insulation ■ Reduction of particle generation and suppression of aggressiveness towards counterpart materials (wafers, glass, etc.) 【Support System】 ■ Design consultation and specification proposals from the drawing stage ■ Rapid response for evaluation test applications (prototype processing)
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Applications/Examples of results
【Available Semiconductor and LCD Equipment Parts】 ■ Inspection and Measurement Process Laser displacement inspection device stage, substrate and wafer mounting platform ■ Transport Process Robot hand (end effector), wafer carrier, transfer guide ■ Pre-Process (Cleaning, Film Formation, Etching) Processing tank, inner surface of piping, chamber parts, CMP peripheral parts 【Implementation Results (Laser Displacement Inspection Stage)】 ■ Issues The labor involved in attaching and drilling PEEK molded parts to aluminum stages was enormous, putting pressure on the manufacturing costs of the equipment. ■ Effects By switching to direct thick-film PEEK coating and machining finishing, the attachment process was completely eliminated. This reduced the total cost of parts by over 30% and thoroughly prevented scratches on substrates due to a uniform PEEK surface. It contributed to improved reliability and productivity of the entire equipment.
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Company information
Nikken Coating Industry Co., Ltd. has been a specialized manufacturer of functional coatings for contract processing, earning the trust of customers across various industries for 79 years since its founding. We leverage our processing technology to maximize the properties of fluororesins, such as non-stick, lubricity, and chemical resistance, providing high-performance coatings that directly address customer challenges, including "Thermo Pro Release" for thermal welding processes and "NonStick STC" for blades and precision molds. In recent years, in response to movements regarding regulations on fluorinated compounds (PFAS), "PEEK resin," which is gaining attention as a substitute for fluororesins, has become a focus. Nikken Coating Industry commercialized the world's first PEEK resin coating, "PEEKCOAT," in 1999. Based on the solid knowledge and know-how accumulated over more than 20 years, we are further intensifying our research and development efforts to explore the potential of next-generation PEEK coatings! We aim to be recognized as "the go-to for PEEK coatings" and will continue to lead the way. As "the best partner for functional coatings that builds trust through technology," Nikken Coating Industry will continue to contribute to the creation of high-quality, high-performance products.
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