Early detection of chemical leaks in semiconductor manufacturing equipment. Supporting risk reduction of equipment downtime and stable operation.
Liquidseeker is a liquid leak detection algorithm that utilizes SWIR (Short-Wave Infrared) technology. By integrating it into compatible SWIR ToF cameras, it can non-contact detect leaks of chemicals, water, oil, and other liquids used in semiconductor manufacturing equipment. It can detect even minor leaks, contributing to the reduction of risks associated with equipment downtime and quality issues due to chemical spills. Do you have any of the following challenges? - Want to detect chemical leaks in semiconductor manufacturing equipment early - Want to prevent equipment downtime due to chemical leaks - Want to understand minor leaks from pipes and joints - Want to automate leak monitoring ■Challenges in Semiconductor Manufacturing In semiconductor manufacturing processes, leaks from chemical supply equipment or piping can lead to production stoppages and equipment recovery work. Early detection of chemical leaks is particularly important, and continuous leak monitoring is required from the perspective of equipment maintenance and preventive maintenance. Liquidseeker supports early detection of equipment abnormalities by detecting chemical leaks using non-contact sensing technology. ■Features of Liquidseeker - Non-contact leak monitoring - Identifies and detects water, chemicals, and oil - Detects even minor leaks - Detects from a distance of up to 3 meters
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■Liquidseeker: Liquid Leak Detection Algorithm This product is an algorithm (software IP) that utilizes the SWIR (Short-Wave Infrared) wavelength range to achieve non-contact liquid detection. By integrating this IP into a ToF camera that meets the application conditions, it becomes possible to detect liquid leaks, seepage, and particles containing moisture. *SWIR (Short-Wave Infrared) generally refers to the wavelength range from 0.9μm (=900nm) to 2.5μm (=2,500nm). ■Principle of Water Leak Detection Liquidseeker detects by utilizing the principle that water absorbs light at specific wavelengths. By combining this IP with a ToF camera that meets the application conditions, it can detect a wide area non-contact, contributing not only to solving traditional challenges but also to improving the efficiency of inspection work. ■Examples of Detectable Liquids Organic solvents: Isopropyl alcohol, Toluene, Ethyl acetate, Ethanol, Acetone, Methyl ethyl ketone Acids: Sulfuric acid, Acetic acid, Hydrofluoric acid, Hydrochloric acid, Hydrogen peroxide Oils: Heavy oil, Light oil, Turbine oil, Silicone oil *Multiple liquids can be detected simultaneously.
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■Main Uses - Leakage monitoring for semiconductor manufacturing equipment Reducing the risk of equipment shutdown due to chemical leaks - Data center equipment monitoring Preventing system failures due to water leaks - Factory equipment monitoring Monitoring leakage from piping, valves, and pump equipment - Chemical plants Early detection of chemical leaks - Infrastructure equipment Equipment maintenance and preventive maintenance applications
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We will provide optimal solutions that contribute to our customers' businesses through our "extensive experience and achievements accumulated over many years" and "high technical capabilities" in the fields of embedded and LSI design.
