Improving wafer yield: Eliminating metal touch! Preventing micro-scratches and dust generation on carriers with PEEK and fluoropolymer coatings.
This is a technical sample solution for metal wafer carriers (carrier jigs) used to store, hold, and transport silicon wafers in the semiconductor manufacturing process, featuring PEEK coating, fluoropolymer coating, or a composite coating of fluoropolymer and PEEK. It uniformly forms a coating from the delicate slots (grooves) where the wafers are stored to the intricate details of the complex frame structure. **Main Benefits of Implementation** - **Prevention of Wafer Scratches and Chipping** Completely eliminates metal contact with the substrate. It alleviates contact stress and friction, preventing minor chipping and scratches during wafer retrieval and insertion. - **Chemical Resistance & Metal Contamination Suppression** Exhibits strong resistance to acidic and alkaline cleaning solutions. Even under thermal conditions, outgassing and leaching of metal ions are extremely low, reducing the risk of contamination to the wafers. - **Electrostatic Discharge (ESD) and Particle Control** Options for anti-static grades are available. It suppresses triboelectric charging, preventing risks of electrostatic discharge (ESD) and issues with particle adhesion in cleanroom environments.
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【Construction Technology】 Contracted PEEK Coating / Contracted Fluororesin Coating 【Technical Features and Functions】 ■ High Wear Resistance and Shock Absorption Minimizes wear on the wafer contact surface, achieving a longer lifespan for the jig itself. ■ Excellent Chemical Resistance and High Purity Balances resistance to various acids, alkalis, and organic solvents with low outgassing. ■ Anti-Static Grade Compatibility Reduces surface resistance values to prevent static electricity buildup. Prevents electrostatic discharge (ESD) and shuts out dust adhesion. 【Target Substrates and Applicable Components】 ■ Metal wafer carriers, cleaning baskets, and various transport jigs made of stainless steel (SUS), aluminum, etc. 【Maintenance System】 ■ In the event of wear on the coating film, we support "recoating" by stripping the coating and applying it again. Reuse of metal carrier substrates is possible.
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**Main Application Uses and Processes** ■ Semiconductor Front-End and Back-End Carrier for wafer transport, storage fixtures in clean rooms ■ Cleaning and Etching Processes Carrier baskets for wafer immersion, baskets for chemical and pure water cleaning ■ Transport and Robot Hand Systems Wafer guides, chuck plates, alignment components **Expected Applications** ■ Issues The use of metal wafer carriers caused fine chipping on the wafer's outer circumference due to contact with the slot grooves (metal touch). Additionally, there was a decrease in yield due to corrosion of the carrier from cleaning chemicals, leaching of metal ions, and particle adhesion caused by frictional static electricity. ■ After Implementation A coating treatment with static electricity prevention features (PEEK/fluororesin) was applied to the entire wafer carrier. ■ Expected Effects - Elimination of metal contact significantly reduced scratches and chipping defects on the wafer, improving yield. - Corrosion from chemicals was eliminated, and foreign particle adhesion was reduced, enhancing cleanability. The longevity of the carrier was also achieved simultaneously.
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Company information
Nikken Coating Industry Co., Ltd. has been a specialized manufacturer of functional coatings for contract processing, earning the trust of customers across various industries for 79 years since its founding. We leverage our processing technology to maximize the properties of fluororesins, such as non-stick, lubricity, and chemical resistance, providing high-performance coatings that directly address customer challenges, including "Thermo Pro Release" for thermal welding processes and "NonStick STC" for blades and precision molds. In recent years, in response to movements regarding regulations on fluorinated compounds (PFAS), "PEEK resin," which is gaining attention as a substitute for fluororesins, has become a focus. Nikken Coating Industry commercialized the world's first PEEK resin coating, "PEEKCOAT," in 1999. Based on the solid knowledge and know-how accumulated over more than 20 years, we are further intensifying our research and development efforts to explore the potential of next-generation PEEK coatings! We aim to be recognized as "the go-to for PEEK coatings" and will continue to lead the way. As "the best partner for functional coatings that builds trust through technology," Nikken Coating Industry will continue to contribute to the creation of high-quality, high-performance products.
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